POLARIZATION ELEMENT, METHOD FOR MANUFACTURING THE SAME, LIQUID CRYSTAL DEVICE, AND ELECTRONIC APPARATUS

• US 20090066885A1
• Filed: 08/14/2008
• Published: 03/12/2009
• Est. Priority Date: 09/12/2007
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: KUMAI, Yoshitomo
• Granted Patent: US 8,094,373 B2
• Time in Patent Office: Days
• US Class Current: 349/96
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles
• CPC Class Codes: G02F 1/133548 Wire-grid polarisers

Abstract

A polarization element includes: a base; a plurality of metal thin wires provided on the base along a predetermined alignment axis; and a plurality of protection films covering each of the plurality of metal thin wires. In the element, each of the protection films covers an upper end and both sidewalls of one of the metal thin wires. Further, a width of a part, which is on the upper end of the one of the metal thin wires, of the each of the protection films in a direction of the alignment axis is larger than a width obtained by summing a width of the one of the metal thin wires in the direction of the alignment axis and widths of parts, which are on the both sidewalls of the one of the metal thin wires, of the each of the protection films in the direction of the alignment axis.

The protection films on sidewalls, which are opposed to each other, of the metal thin wires that are adjacent form an air gap.

Claims

1. A polarization element, comprising:

a base;

a plurality of metal thin wires provided on the base along a predetermined alignment axis; and

a plurality of protection films covering each of the plurality of metal thin wires,

wherein each of the protection films covers an upper end and both sidewalls of one of the metal thin wires,

wherein a width of a part, the part being on the upper end of the one of the metal thin wires, of the each of the protection films in a direction of the alignment axis is larger than a width obtained by summing a width of the one of the metal thin wires in the direction of the alignment axis and widths of parts, the parts being on the both sidewalls of the one of the metal thin wires, of the each of the protection films in the direction of the alignment axis, and

wherein the protection films on sidewalls, the sidewalls being opposed to each other, of the metal thin wires that are adjacent form an air gap.

2. The polarization element according to claim 1, wherein parts, the parts covering upper ends of the metal thin wires that are adjacent, of the protection films contact with each other in the direction of the alignment axis.

3. The polarization element according to claim 2, wherein a plurality of deposited films are formed on an upper surface of the part, the part covering the upper ends of the metal thin wires that are adjacent, of the protection films so as to form a protection layer.

4. The polarization element according to claim 1, wherein the protection films are made of a translucent insulating material.

7. A liquid crystal device, comprising:

a pair of substrates;

a liquid crystal layer sandwiched in between the pair of substrates;

the polarization element, according to claim 1, formed at a part, the part being close to the liquid crystal layer, of at least one of the pair of substrates, and

an alignment film provided at a part, the part being closer to the liquid crystal layer than the polarization element, and formed by rubbing treatment.

8. Electronic apparatus comprising the liquid crystal device according to claim 7 as an optical modulator.

5. A method for manufacturing a polarization element, comprising:

a) forming a plurality of metal thin wires provided on a base along a predetermined alignment axis; and

b) forming a plurality of protection films covering an upper end and both sidewalls of each of the plurality of metal thin wires, wherein in the step b), each of the protection films is formed on the upper end and the both sidewalls of one of the metal thin wires by a chemical vapor deposition (CVD) method, and a part, the part being on the upper end of the one of the metal thin wires, of each of the protection films is allowed to grow by further progressing the formation of the protection film so as to make a width of a part, the part being on the upper end of the one of the metal thin wires, of the each of the protection films in a direction of the alignment axis larger than a width obtained by summing a width of the one of the metal thin wires in the direction of the alignment axis and widths of parts, the parts being on the both sidewalls of the one of the metal thin wires, of the each of the protection films in the direction of the alignment axis.

6. The method for manufacturing a polarization element according to claim 5, wherein a thickness of the protection films, the protection films covering the upper end of the metal thin wires, in an orthogonal direction to the base is 50 nm and above.