METHOD AND SYSTEM FOR A PULSED LASER SOURCE EMITTING SHAPED OPTICAL WAVEFORMS
First Claim
1. A laser system for processing a workpiece, the laser system comprising:
- a tunable pulsed laser source having an output comprising a set of optical pulses, wherein the tunable pulsed laser source comprises;
a seed source adapted to generate a seed signal;
an optical circulator having a first port coupled to the seed source, a second port, and a third port;
a modulator driver adapted to produce an electrical waveform;
an amplitude modulator coupled to the modulator driver and adapted to receive the electrical waveform, wherein the amplitude modulator is characterized by a first side coupled to the second port of the optical circulator and a second side;
a first optical amplifier characterized by an input end and a reflective end, wherein the input end is coupled to the second side of the amplitude modulator; and
a second optical amplifier coupled to the third port of the optical circulator;
a controller configured to adjust laser parameters of the tunable pulsed laser source;
a supporting member configured to support the workpiece; and
an optical system configured to adjust laser beams from the tunable pulsed laser source and direct them towards the workpiece.
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Abstract
A laser system for processing a workpiece includes a tunable pulsed laser source having an output comprising a set of optical pulses. The tunable pulsed laser source includes a seed source, an optical circulator having a first port coupled to the seed source, a second port, and a third port, a modulator driver, and an amplitude modulator coupled to the modulator driver. The tunable pulsed laser source also includes a first optical amplifier characterized by an input end and a reflective end and a second optical amplifier coupled to the third port of the optical circulator. The laser system also includes a controller configured to adjust laser parameters of the tunable pulsed laser source, a supporting member configured to support the workpiece, and an optical system configured to adjust laser beams from the tunable pulsed laser source and direct them towards the workpiece.
26 Citations
18 Claims
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1. A laser system for processing a workpiece, the laser system comprising:
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a tunable pulsed laser source having an output comprising a set of optical pulses, wherein the tunable pulsed laser source comprises; a seed source adapted to generate a seed signal; an optical circulator having a first port coupled to the seed source, a second port, and a third port; a modulator driver adapted to produce an electrical waveform; an amplitude modulator coupled to the modulator driver and adapted to receive the electrical waveform, wherein the amplitude modulator is characterized by a first side coupled to the second port of the optical circulator and a second side; a first optical amplifier characterized by an input end and a reflective end, wherein the input end is coupled to the second side of the amplitude modulator; and a second optical amplifier coupled to the third port of the optical circulator; a controller configured to adjust laser parameters of the tunable pulsed laser source; a supporting member configured to support the workpiece; and an optical system configured to adjust laser beams from the tunable pulsed laser source and direct them towards the workpiece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of laser processing, the method comprising:
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outputting a first set of optical pulses from a tunable pulsed laser source toward a workpiece, wherein the workpiece comprises at least a first layer of a first material and a second layer of a second material, the first material being different from the second material, wherein the tunable pulsed laser source comprises; a seed source adapted to generate a seed signal; an optical circulator having a first port coupled to the seed source, a second port, and a third port; a modulator driver adapted to produce an electrical waveform; an amplitude modulator coupled to the modulator driver and adapted to receive the electrical waveform, wherein the amplitude modulator is characterized by a first side coupled to the second port of the optical circulator and a second side; a first optical amplifier characterized by an input end and a reflective end, wherein the input end is coupled to the second side of the amplitude modulator; and a second optical amplifier coupled to the third port of the optical circulator; processing the first layer using the first set of optical pulses; outputting a second set of optical pulses from the tunable pulsed laser source toward the workpiece, wherein the second set of optical pulses is different from the first set of optical pulses; and processing the second layer using the second set of optical pulses. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification