Micromagnetic Device and Method of Forming the Same
First Claim
1. A micromagnetic device formed on a substrate, comprising:
- a first insulating layer formed above said substrate;
a first seed layer formed above said first insulating layer;
a first conductive winding layer selectively formed above said first seed layer;
a second insulating layer formed above said first conductive winding layer;
a first magnetic core layer formed above said second insulating layer;
a third insulating layer formed above said first magnetic core layer;
a second magnetic core layer formed above said third insulating layer;
a fourth insulating layer formed above said second magnetic core layer;
a second seed layer formed above said fourth insulating layer; and
a second conductive winding layer formed above said second seed layer and in vias to said first conductive winding layer, said first conductive winding layer and said second conductive winding layer forming a winding for said micromagnetic device.
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Abstract
A micromagnetic device includes a first insulating layer formed above a substrate, a first seed layer formed above the first insulating layer, a first conductive winding layer selectively formed above the first seed layer, and a second insulating layer formed above the first conductive winding layer. The micromagnetic device also includes a first magnetic core layer formed above the second insulating layer, a third insulating layer formed above the first magnetic core layer, and a second magnetic core layer formed above the third insulating layer. The micromagnetic device still further includes a fourth insulating layer formed above the second magnetic core layer, a second seed layer formed above the fourth insulating layer, and a second conductive winding layer formed above the second seed layer and in vias to the first conductive winding layer. The first and second conductive winding layers form a winding for the micromagnetic device.
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Citations
30 Claims
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1. A micromagnetic device formed on a substrate, comprising:
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a first insulating layer formed above said substrate; a first seed layer formed above said first insulating layer; a first conductive winding layer selectively formed above said first seed layer; a second insulating layer formed above said first conductive winding layer; a first magnetic core layer formed above said second insulating layer; a third insulating layer formed above said first magnetic core layer; a second magnetic core layer formed above said third insulating layer; a fourth insulating layer formed above said second magnetic core layer; a second seed layer formed above said fourth insulating layer; and a second conductive winding layer formed above said second seed layer and in vias to said first conductive winding layer, said first conductive winding layer and said second conductive winding layer forming a winding for said micromagnetic device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A micromagnetic device formed on a substrate, comprising:
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a first seed layer formed above said substrate; a first conductive winding layer selectively formed above said first seed layer; a first insulating layer formed above said first conductive winding layer; a second seed layer formed above said first insulating layer; a first magnetic core layer formed above said second seed layer; a first protective layer formed above said first magnetic core layer; a second insulating layer formed above said first protective layer; a third seed layer formed above said second insulating layer; a second magnetic core layer formed above said third seed layer; a second protective layer formed above said second magnetic core layer; a third insulating layer formed above said second magnetic core layer; and a second conductive winding layer formed above said third insulating layer and in vias to said first conductive winding layer, said first conductive winding layer and said second conductive winding layer forming a winding for said micromagnetic device. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification