Production methods of electronic devices
First Claim
1. A method of production of an electronic device having mounted thereon a microelectromechanical system element, which comprises the steps of:
- forming a micromachine component and electronic component for operation of said micromachine component on a substrate to form said system element; and
bonding to said substrate a lid covering an active surface of said substrate and provided with wiring patterns to define an operating space for said micromachine component and electrically connecting said electronic component and the wiring patterns of said lid at a bonded part of said substrate and said lid.
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Abstract
A method of producing an electronic device having mounted thereon a microelectromechanical system element. The method includes forming a micromachine component and electronic component for operation of the micromachine component on a substrate to form the system element, and bonding to the substrate a lid covering an active surface of the substrate and provided with wiring patterns to define an operating space for the micromachine component and electrically connecting the electronic component and the wiring patterns of the lid at a bonded part of the substrate and the lid.
61 Citations
14 Claims
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1. A method of production of an electronic device having mounted thereon a microelectromechanical system element, which comprises the steps of:
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forming a micromachine component and electronic component for operation of said micromachine component on a substrate to form said system element; and bonding to said substrate a lid covering an active surface of said substrate and provided with wiring patterns to define an operating space for said micromachine component and electrically connecting said electronic component and the wiring patterns of said lid at a bonded part of said substrate and said lid. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of production of an electronic device having mounted thereon a functional element, which comprising the steps of:
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securing said functional element to a device body and/or lid; and bonding said device body and said lid to define an element-carrying space, forming a continuous ultrasonic bonded part at said device body and said lid in contact with an outer periphery of said element-carrying space side of said members without interruption, and thereby sealing air-tightly said element-carrying space. - View Dependent Claims (9, 10, 11)
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- 12. A method of covering and securing a lid in an electronic device having mounted thereon a functional element, which comprises a step of forming securing regions in predetermined patterns at an outer periphery of a device body carrying said functional element, bringing corresponding parts of said lid into abutment with said securing regions, and sealing air-tight said device body and said lid by ultrasonic bonding.
Specification