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APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

  • US 20090070946A1
  • Filed: 09/16/2008
  • Published: 03/19/2009
  • Est. Priority Date: 09/18/2007
  • Status: Abandoned Application
First Claim
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1. A substrate processing apparatus comprising:

  • a processor including at least one processing unit for performing a predetermined process on a substrate; and

    an indexer part for receiving an unprocessed substrate from outside to transfer the unprocessed substrate to the processor and for receiving a processed substrate from the processor to transport the processed substrate to outside, the indexer part including an edge cleaning part for cleaning an edge of a substrate prior to the transfer of the substrate to the processor.

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