APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
First Claim
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1. A substrate processing apparatus comprising:
- a processor including at least one processing unit for performing a predetermined process on a substrate; and
an indexer part for receiving an unprocessed substrate from outside to transfer the unprocessed substrate to the processor and for receiving a processed substrate from the processor to transport the processed substrate to outside, the indexer part including an edge cleaning part for cleaning an edge of a substrate prior to the transfer of the substrate to the processor.
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Abstract
A cleaning processing part including an edge cleaning processing unit for cleaning an edge of a substrate is provided in an indexer block. An indexer robot provided in the indexer block transports an unprocessed substrate taken out of a cassette to the cleaning processing part before transporting the unprocessed substrate to an anti-reflection film processing block serving as a processor. The cleaning processing part cleans an edge and a back surface of a substrate.
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14 Claims
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1. A substrate processing apparatus comprising:
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a processor including at least one processing unit for performing a predetermined process on a substrate; and an indexer part for receiving an unprocessed substrate from outside to transfer the unprocessed substrate to the processor and for receiving a processed substrate from the processor to transport the processed substrate to outside, the indexer part including an edge cleaning part for cleaning an edge of a substrate prior to the transfer of the substrate to the processor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of processing a substrate comprising:
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a) receiving an unprocessed substrate to be processed in a processor into an indexer part, the processor including at least one processing unit for performing a predetermined process on a substrate, the indexer part transferring a substrate to and from the processor; b) cleaning an edge of the substrate in the indexer part; and c) transporting the substrate with the edge cleaned from the indexer part to the processor. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification