PYROELECTRIC INFRARED SENSOR
First Claim
1. A pyroelectric infrared sensor having flexibility and comprising:
- a) a substrate comprising a polymer material,b) a layer of vinylidene fluoride oligomer being formed on said substrate and comprising CF3-(CH2CF2)n-CmH2m+1 (n=5 to 50, m=1 to
10) or a substance obtained by replacing its CmH2m+1 group by halogen atom,c) a lower electrode having flexibility and being formed between the substrate and the vinylidene fluoride oligomer layer, andd) an upper electrode having flexibility and being formed on said vinylidene fluoride oligomer layer.
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Accused Products
Abstract
There is provided a pyroelectric infrared sensor being capable of changing its shape and having high sensitivity. The sensor comprises the substrate 11 made of a polymer material such as polyimide or polyethylene terephthalate and having flexibility, the layer 13 comprising vinylidene fluoride (VDF), and the flexible electrodes 12 and 14 comprising an Al-deposited film and provided on and under the VDF oligomer layer 13. The pyroelectric infrared sensor of the present invention has flexibility as a whole due to flexibility of each component elements and can be formed into desired shapes. In addition, since a substrate made of a polymer material has heat capacity and heat conductivity lower than those of Si substrates used on conventional pyroelectric infrared sensors, sensitivity of the sensor can be increased.
18 Citations
9 Claims
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1. A pyroelectric infrared sensor having flexibility and comprising:
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a) a substrate comprising a polymer material, b) a layer of vinylidene fluoride oligomer being formed on said substrate and comprising CF3-(CH2CF2)n-CmH2m+1 (n=5 to 50, m=1 to
10) or a substance obtained by replacing its CmH2m+1 group by halogen atom,c) a lower electrode having flexibility and being formed between the substrate and the vinylidene fluoride oligomer layer, and d) an upper electrode having flexibility and being formed on said vinylidene fluoride oligomer layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification