ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, OPTICAL ELEMENT AND MANUFACTURING METHOD THEREOF, AND DEVICE MANUFACTURING METHOD
First Claim
1. An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source, the illumination optical system comprising:
- a first optical path in which a diffractive optical element can be arranged at a first position thereof;
a second optical path in which a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and
a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system is arranged;
wherein the distribution forming optical system forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths.
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Accused Products
Abstract
An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source has a first optical path in which a diffractive optical element can be arranged at a first position thereof; a second optical path in which a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system is arranged. The distribution forming optical system forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths.
143 Citations
40 Claims
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1. An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source, the illumination optical system comprising:
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a first optical path in which a diffractive optical element can be arranged at a first position thereof; a second optical path in which a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually can be arranged at a second position thereof; and a third optical path which is an optical path of light having passed via at least one of the first optical path and the second optical path and in which a distribution forming optical system is arranged; wherein the distribution forming optical system forms a predetermined light intensity distribution on an illumination pupil located in the third optical path, based on the light having passed via at least one of the first and second optical paths. - View Dependent Claims (2, 3, 4, 5, 21, 22, 23, 24, 25)
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6. An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source, the illumination optical system comprising:
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a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually; and a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil, based on light having passed via the spatial light modulator; wherein the plurality of optical elements of the spatial light modulator are selectively located between a position in an optical path of the illumination optical system and a position off the optical path of the illumination optical system. - View Dependent Claims (7, 8, 26, 27, 28, 29, 30)
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9. An illumination optical system which illuminates a surface to be illuminated on the basis of light from a light source, the illumination optical system comprising:
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a diffractive optical element which can be inserted at a first position in an optical path of the illumination optical system; a spatial light modulator with a plurality of optical elements arrayed two-dimensionally and controlled individually, which can be inserted at the first position or at a second position optically conjugate with the first position; and a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil, based on light having passed via at least one of the diffractive optical element and the spatial light modulator. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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31. A method for manufacturing an optical element for forming a predetermined illumination pupil luminance distribution on the basis of light from a light source, the optical element being applied to an exposure apparatus performing an exposure of a predetermined pattern on a substrate with light from the predetermined illumination pupil luminance distribution, the method comprising:
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a first step in which the predetermined pattern is set in the exposure apparatus; a second step in which the light from the light source is modulated by a spatial light modulator, for forming a required illumination pupil luminance distribution; a third step in which the exposure of the predetermined pattern set in the exposure apparatus is effected on the substrate, based on the light modulated by the spatial light modulator; a fourth step in which an exposed pattern exposed on the substrate is measured; a fifth step in which the illumination pupil luminance distribution is adjusted based on the exposed pattern measured in the fourth step; and a sixth step in which the optical element is manufactured based on information of the illumination pupil luminance distribution used in the exposure of the exposed pattern. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification