PERIODIC DIMPLE ARRAY
First Claim
1. A microelectromechanical (MEMS) device comprising:
- a substrate;
an actuation electrode over the substrate;
a reflective layer over the actuation electrode, the reflective layer including at least one aperture through the reflective layer; and
a support layer between the actuation electrode and the reflective layer, the support layer including a recess between the actuation electrode and the at least one aperture, wherein upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary, wherein the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion.
3 Assignments
0 Petitions
Accused Products
Abstract
A microelectromechanical (MEMS) device includes a substrate, an actuation electrode over the substrate, a reflective layer over the actuation electrode, and a support layer between the actuation electrode and the reflective layer. The reflective layer includes at least one aperture through the reflective layer. The support layer includes a recess between the actuation electrode and the at least one aperture. Upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary. The reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion.
-
Citations
40 Claims
-
1. A microelectromechanical (MEMS) device comprising:
-
a substrate; an actuation electrode over the substrate; a reflective layer over the actuation electrode, the reflective layer including at least one aperture through the reflective layer; and a support layer between the actuation electrode and the reflective layer, the support layer including a recess between the actuation electrode and the at least one aperture, wherein upon application of a control signal to the device, at least a first portion of the reflective layer is configured to move into the recess and at least a second portion of the reflective layer is configured to remain stationary, wherein the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
-
-
31. A microelectromechanical (MEMS) device comprising:
-
means for applying a control signal; means for supporting the control signal applying means, the control signal applying means over the means for supporting the control signal applying means; means for modulating light; and means for supporting the light modulating means, the light modulating means over the means for supporting the control signal applying means, the means for supporting the light modulating means between the control signal applying means and the light modulating means, the light modulating means including means for conducting a fluid through the light modulating means, the means for supporting the light modulating means including a recess between the control signal applying means and the fluid conducting means, wherein upon application of a control signal to the device, at least a first portion of the light modulating means is configured to move into the recess and at least a second portion of the light modulating means is configured to remain stationary, wherein the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion. - View Dependent Claims (32, 33, 34, 35, 36)
-
-
37. A method of manufacturing a microelectromechanical (MEMS) device, the method comprising:
-
forming an actuation electrode over a substrate; forming a support layer over the actuation electrode; forming a reflective layer over the support layer; forming at least one aperture through the reflective layer; and removing a first portion of the support layer between the actuation electrode and the at least one aperture while a second portion of the support layer remains, the second portion supporting the reflective layer, a width of the first portion larger than a width of the at least one aperture, wherein after removal the reflectivity of the MEMS device is dominantly modulated by changing a phase difference between light reflected from the first portion and light reflected from the second portion. - View Dependent Claims (38, 39)
-
-
40-52. -52. (canceled)
Specification