STORAGE MEDIUM STORING EXPOSURE CONDITION DETERMINATION PROGRAM, EXPOSURE CONDITION DETERMINATION METHOD, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
First Claim
1. A computer-readable storage medium for causing a computer to execute determination of an exposure condition for use in illuminating an original plate with an illumination optical system and projecting an image of a pattern of the original plate onto a substrate through a projection optical system, the program causing the computer to perform operations comprising:
- setting a light intensity distribution on a pupil plane in the illumination optical system based on a constraint condition concerning an optical element constituting the illumination optical system;
calculating the image of the pattern of the original plate to be projected onto the substrate using the light intensity distribution; and
determining the exposure condition for exposing the substrate with the image of the pattern of the original plate based on a calculation result of the image of the pattern of the original plate and the constraint condition.
1 Assignment
0 Petitions
Accused Products
Abstract
A computer-readable storage medium storing a program for causing a computer to execute determination of an exposure condition for use in illuminating an original plate with an illumination optical system and projecting an image of a pattern of the original plate onto a substrate through a projection optical system. The program causes the computer to perform operations including setting a light intensity distribution on a pupil plane in the illumination optical system based on a constraint condition concerning an optical element constituting the illumination optical system, calculating the image of the pattern of the original plate to be projected onto the substrate using the light intensity distribution, and determining the exposure condition for exposing the substrate with the image of the pattern of the original plate based on a calculation result of the image of the pattern of the original plate and the constraint condition.
23 Citations
16 Claims
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1. A computer-readable storage medium for causing a computer to execute determination of an exposure condition for use in illuminating an original plate with an illumination optical system and projecting an image of a pattern of the original plate onto a substrate through a projection optical system, the program causing the computer to perform operations comprising:
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setting a light intensity distribution on a pupil plane in the illumination optical system based on a constraint condition concerning an optical element constituting the illumination optical system; calculating the image of the pattern of the original plate to be projected onto the substrate using the light intensity distribution; and determining the exposure condition for exposing the substrate with the image of the pattern of the original plate based on a calculation result of the image of the pattern of the original plate and the constraint condition. - View Dependent Claims (2, 5, 7, 9)
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3. A computer-readable storage medium storing a program for causing a computer to execute determination of an exposure condition for use in illuminating an original plate using an illumination optical system and projecting an image of a pattern of the original plate onto a substrate through a projection optical system, the program causing the computer to perform operations comprising:
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setting a light intensity distribution by selecting data from a data group of light intensity distributions formable by the illumination optical system on a pupil plane in the illumination optical system; calculating the image of the pattern of the original plate to be projected onto the substrate using the light intensity distribution; and determining an exposure condition for exposing the substrate with the image of the pattern of the original plate based on a calculation result of the image of the pattern of the original plate and the data group. - View Dependent Claims (4, 6, 8, 10)
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11. A method for determining, using a computer, an exposure condition for use in illuminating an original plate with an illumination optical system and projecting an image of a pattern of the original plate onto a substrate through a projection optical system, the method comprising:
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setting a light intensity distribution on a pupil plane in the illumination optical system based on a constraint condition concerning an optical element constituting the illumination optical system; calculating the image of the pattern of the original plate to be projected onto the substrate using the light intensity distribution; and determining an exposure condition for exposing the substrate with the image of the pattern of the original plate based on a calculation result of the image of the pattern of the original plate and the constraint condition. - View Dependent Claims (12, 13)
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14. A method for determining, using a computer, an exposure condition for use in illuminating an original plate with an illumination optical system and projecting an image of a pattern of the original plate onto a substrate through a projection optical system, the method comprising:
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setting a light intensity distribution by selecting data from a data group of light intensity distributions formable by the illumination optical system on a pupil plane in the illumination optical system; calculating image of the pattern of the original plate to be projected onto the substrate using the light intensity distribution; and determining the exposure condition for exposing the substrate with the image of the pattern of the original plate based on a calculation result of the image of the pattern of the original plate and the data group. - View Dependent Claims (15, 16)
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Specification