System for Determining Repetitive Work Units

• US 20090077527A1
• Filed: 09/10/2008
• Published: 03/19/2009
• Est. Priority Date: 09/14/2007
• Status: Active Grant

• Current Assignee: Dino Technology Acquisition LLC
• Original Assignee: Luminescent Technologies, Inc. (KLA Corporation)
• Inventors: Gergov, Jordan, Baisuck, Allen
• Granted Patent: US 8,214,775 B2
• Time in Patent Office: Days
• US Class Current: 716/55
• CPC Class Codes: G03F 1/68 Preparation processes not covered by groups G03F1/20 - G03F1/50
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
• CPC Class Codes: G03F 1/76 Patterning of masks by imaging

Abstract

During a method for generating a mask pattern for a photo-mask, a target pattern is partitioned into subsets of the target pattern. The subsets of the target pattern may be selected so that at least some of the subsets are approximately identical, thereby dividing the subsets into a degenerate group and a non-degenerate group. A group of the subsets may include multiple shapes, and a given target pattern may be significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale. The non-degenerate group of subsets of the target pattern may be distributed to multiple processors. These processors may be used to determine subsets of the mask pattern based on the non-degenerate group of subsets of the target pattern. The subsets of the mask pattern may be combined to generate the mask pattern.

Claims

1. A method for generating a mask pattern to be used on a photo-mask in a photolithographic process, comprising:

partitioning a target pattern into subsets of the target pattern, wherein the photo-mask is to print the target pattern during the photolithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

using the plurality of processors to determine subsets of the mask pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the mask pattern corresponds to a respective subset of the target pattern; and

combining the subsets of the mask pattern to generate the mask pattern.

2. The method of claim 1, wherein the predetermined length scale is a multiple of a wavelength of a source in the photo-lithographic process, and wherein the multiple is between 1 and 10.

3. The method of claim 2, wherein the pre-determined length scale includes one or more cell structures in the target pattern.

4. The method of claim 3, wherein the partitioning is independent of boundaries of cells having at least one of the cell structures.

5. The method of claim 3, wherein at least one of the subsets of the target pattern encompasses multiple cells having one or more of the cell structures.

6. The method of claim 3, wherein at least one of the subsets of the target pattern encompasses portions of multiple cells having one or more of the cell structures.

7. The method of claim 3, wherein the subsets of the target pattern are aligned with boundaries of cells having one or more of the cell structures.

8. The method of claim 7, wherein the alignment is adaptively determined during the partitioning.

9. The method of claim 3, wherein the one or more cell structures include one or more bit cells in a memory block.

10. The method of claim 1, wherein the target pattern corresponds to memory.

11. The method of claim 1, wherein the partitioning is in accordance with a size of the target pattern.

12. The method of claim 1, wherein the partitioning is in accordance with a computation capability of the plurality of processors.

13. The method of claim 1, wherein the partitioning is iteratively repeated to increase the size of the degenerate group of subsets of the target pattern and to reduce the size of the non-degenerate group of subsets of the target pattern, thereby decreasing a computation time associated with generating the mask pattern.

14. The method of claim 1, wherein the partitioning is based at least in part on a predicted degree of degeneracy.

15. The method of claim 1, wherein at least portions of adjacent subsets of the target pattern partially overlap each other.

16. The method of claim 15, wherein the overlap is less than a pre-determined multiple of a wavelength of a source in the photolithographic process.

17. The method of claim 1, wherein at least some of the processors determine subsets of the mask pattern concurrently.

18. The method of claim 1, wherein at least some of the processors determine subsets of the mask pattern at different times.

19. The method of claim 1, further comprising converting a first format of a target pattern into a second format prior to the partitioning, wherein the first format includes a hierarchical representation of the target pattern and the second format includes a pixel-based representation.

20. The method of claim 19, wherein the first format is compatible with GDSII or OASIS.

21. The method of claim 1, wherein a size of at least some of the subsets of the target pattern is less than 100 μ

m².

22. The method of claim 1, wherein a size of at least some of the subsets of the target pattern is less than 1000 μ

m².

23. The method of claim 1, wherein a size of at least some of the subsets of the target pattern is greater than 10000 nm².

24. The method of claim 1, further comprising verifying the mask pattern, wherein the verifying involves comparing an estimated wafer pattern produced in the photolithographic process using a photo-mask corresponding to the mask pattern with the target pattern, and wherein the verifying involves partitioning the mask pattern into subsets of the mask pattern, and wherein the subsets of the mask pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the mask pattern into a degenerate group of subsets of the mask pattern and a non-degenerate group of subsets of the mask pattern.

25. A computer-program product for use in conjunction with a computer system, the computer-program product comprising a computer-readable storage medium and a computer-program mechanism embedded therein for generating a mask pattern to be used on a photo-mask in a photolithographic process, the computer-program mechanism including:

instructions for partitioning a target pattern into subsets of the target pattern, wherein the photo-mask is to print the target pattern during the photolithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

instructions for distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

instructions for using the plurality of processors to determine subsets of the mask pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the mask pattern corresponds to a respective subset of the target pattern; and

instructions for combining the subsets of the mask pattern to generate the mask pattern.

26. A computer system, comprising:

at least one processor;

at least one memory; and

at least one program module, the program module stored in the memory and configured to be executed by the processor, wherein at least the program module is for generating a mask pattern to be used on a photo-mask in a photolithographic process, at least the program module mechanism including;

instructions for partitioning a target pattern into subsets of the target pattern, wherein the photo-mask is to print the target pattern during the photolithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

instructions for distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

instructions for using the plurality of processors to determine subsets of the mask pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the mask pattern corresponds to a respective subset of the target pattern; and

instructions for combining the subsets of the mask pattern to generate the mask pattern.

27. A computer system, comprising:

means for computing;

means for storing; and

at least one program module mechanism, the program module mechanism stored in at least the means for storing and configured to be executed by at least the means for computing, wherein at least the program module is for generating a mask pattern to be used on a photo-mask in a photolithographic process, at least the program module mechanism including;

instructions for partitioning a target pattern into subsets of the target pattern, wherein the photo-mask is to print the target pattern during the photolithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

instructions for distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

instructions for using the plurality of processors to determine subsets of the mask pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the mask pattern corresponds to a respective subset of the target pattern; and

instructions for combining the subsets of the mask pattern to generate the mask pattern.

28. A semiconductor wafer, wherein the semiconductor wafer is produced in a photolithographic process that includes a photo-mask, wherein a mask pattern to which the photo-mask corresponds is determined in a process including the operations of:

partitioning a target pattern into subsets of the target pattern, wherein the photo-mask is to print the target pattern during the photolithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

using the plurality of processors to determine subsets of the mask pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the mask pattern corresponds to a respective subset of the target pattern; and

combining the subsets of the mask pattern to generate the mask pattern.

29. A photo-mask for use in a photolithographic process, wherein a mask pattern to which the photo-mask corresponds is determined in a process including the operations of:

partitioning a target pattern into subsets of the target pattern, wherein the photo-mask is to print the target pattern during the photolithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

using the plurality of processors to determine subsets of the mask pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the mask pattern corresponds to a respective subset of the target pattern; and

combining the subsets of the mask pattern to generate the mask pattern.

30. A data file stored in a computer-readable memory, comprising information corresponding to a write pattern, wherein the write pattern is to print a wafer pattern in a mask-less lithographic process, wherein the write pattern is determined in a process that includes the operations of:

partitioning a target pattern into subsets of the target pattern, wherein the write pattern is to print the target pattern during the mask-less lithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

using the plurality of processors to determine subsets of the write pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the write pattern corresponds to a respective subset of the target pattern; and

combining the subsets of the write pattern to generate the write pattern.

31. A method for partitioning a target pattern to be used in generating a mask pattern to be used on a photo-mask in a photolithographic process, comprising:

partitioning a target pattern into subsets of the target pattern, wherein the photo-mask is to print the target pattern during the photolithographic process, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale; and

determining a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern.

32. A method for partitioning a target pattern to be used in generating a write pattern to be used in a mask-less lithography process, comprising:

partitioning a target pattern into subsets of the target pattern, wherein the write pattern is to be used to print the target pattern during the mask-less lithographic process, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale; and

determining a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern.

33. A method for generating a write pattern to be used in a mask-less lithography process, comprising:

partitioning a target pattern into subsets of the target pattern, wherein the write pattern is to be used to print the target pattern during the mask-less lithographic process, wherein the subsets of the target pattern are selected so that at least some of the subsets are approximately identical, thereby dividing the subsets of the target pattern into a degenerate group of subsets of the target pattern and a non-degenerate group of subsets of the target pattern, wherein at least a group of the subsets of the target patterns include multiple shapes, and wherein a given target pattern in at least the group of subsets is significantly larger than a pre-determined length scale and a given shape in the multiple shapes is smaller than the pre-determined length scale;

distributing the non-degenerate group of subsets of the target pattern to a plurality of processors;

using the plurality of processors to determine subsets of the write pattern in accordance with the non-degenerate group of subsets of the target pattern, wherein a respective subset of the write pattern corresponds to a respective subset of the target pattern; and

combining the subsets of the write pattern to generate the write pattern.