APPARATUS AND METHOD FOR CLEANING AND DRYING SOLID OBJECTS

• US 20090077825A1
• Filed: 07/15/2008
• Published: 03/26/2009
• Est. Priority Date: 07/17/2007
• Status: Abandoned Application

• Current Assignee: Semiconductor Analytical Services Incorporated
• Original Assignee: Semiconductor Analytical Services Incorporated
• Inventors: Toofan, Mahmood, Toofan, Jahansooz
• Application Number:
  US12/173,464
• Publication Number:
  US 20090077825A1
• Time in Patent Office: Days
• US Class Current: 34/273
• CPC Class Codes: H01L 21/67034 for drying
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/67313 Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements

Abstract

An apparatus and a method are described to dry solid objects being manufactured in a chain of steps. The apparatus contains a cartridge to hold the objects, a chamber to house the cartridge, nozzle sections to spray drying agents on the objects, and a vacuum section to remove the drying agent and the released solvent. The apparatus also contains an optical radiation source such as an IR lamp for heating the objects, which can be used in conjunction with the vacuum section for removing solvent and drying steps. The cartridge or the nozzles can be swayed changing the orientation of the objects and the nozzles. The spraying step and evacuating steps can be repeated as needed.

Claims

1. An apparatus for drying an object having a solvent on its surface comprising:

a) a chamber containing one or more objects in a cartridge, the cartridge being capable of swaying the objects;

b) one or more nozzle sections comprising a plurality of nozzles, attached to the chamber and capable of delivering a drying agent;

c) an optical radiation heating source attached to the inside of the chamber; and

d) a vacuum section connected to the chamber.

2. The apparatus of claim 1 wherein the chamber is made of non-corroding material.

3. The apparatus of claim 1 wherein cartridge is coated with PTFE, HDPP, or HDPE.

4. The apparatus of claim 1 wherein the output of the plurality of nozzles is directed towards the face of the objects.

5. The apparatus of claim 1 wherein one or more nozzle sections are distributed around the circumference of an object.

6. The apparatus of claim 1 wherein nozzles are distributed in the plane, above the plane, or below the plane of the object.

7. The apparatus of claim 1 wherein the optical radiation-heating source comprises a visible radiation source.

8. The apparatus of claim 1 wherein the optical radiation-heating source comprises an infra-red radiation source.

9. The apparatus of claim 1 wherein the optical radiation-heating source is a microwave source.

10. The apparatus of claim 1 wherein the drying agent is a gas, a liquid, or a mixture of a gas and a liquid.

11. The apparatus of claim 1 wherein the swaying mechanism changes the orientation of the objects relative to vertical direction.

12. The apparatus of claim 1 wherein the one or more nozzle sections are capable of swaying the orientation of nozzles.

13. The apparatus of claim 1 further comprising a pre-vacuum tank.

14. An method of drying an object having a solvent on its surface, comprising:

a) placing one or more objects in a cartridge, the cartridge being capable of swaying the objects;

b) placing the cartridge in a chamber, the chamber further comprising one or more nozzle sections comprising a plurality of nozzles, an optical radiation heating source, and a vacuum section;

c) spraying the objects with a drying agent while swaying the objects;

d) removing the drying agent and solvent from the chamber using the vacuum section; and

e) heating the objects using the optical radiation-heating source, while using the vacuum section.

15. The method of claim 14 wherein the drying agent is a gas, a liquid, or a mixture of a gas and a liquid.

16. The method of claim 14 wherein the drying agent is one or more members of a group consisting of nitrogen gas, inert gases, air, methyl alcohol, ethyl alcohol, propyl alcohol, and isopropyl alcohol.

17. The method of claim 14 wherein the one or more nozzle sections are capable of swaying the orientation of nozzles and spraying impinges the drying agent on a surface of the objects.

18. The method of claim 14 wherein the spraying step and the removing step are repeated.

19. An apparatus for drying an object having a solvent on its surface comprising:

a) a chamber containing one or more objects in a cartridge;

b) one or more nozzle sections comprising a plurality of nozzles, attached to the chamber and capable of delivering a drying agent;

c) an optical radiation heating source attached to inside of the chamber; and

d) a vacuum section connected to the chamber.

20. An method of drying an object having a solvent on its surface, comprising:

a) placing one or more objects in a cartridge and placing the cartridge in a chamber, the chamber containing one or more nozzle sections comprising a plurality of nozzles, an optical radiation heating source attached to inside of the chamber, and a vacuum section connected to the chamber;

b) spraying the objects with a drying agent;

c) removing the drying agent and solvent from the chamber using the vacuum section; and

d) heating the objects using the optical radiation heating source, while using the vacuum section.