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ELECTROSTATIC ACTUATOR

  • US 20090079296A1
  • Filed: 11/18/2008
  • Published: 03/26/2009
  • Est. Priority Date: 05/18/2006
  • Status: Active Grant
First Claim
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1. An electrostatic actuator comprising:

  • a stator having a plurality of stator-side electrodes;

    a mover having a plurality of mover-side electrodes; and

    a drive signal generating portion supplying predetermined drive signals between the stator-side electrodes and the mover-side electrodes,wherein the mover is moved toward a predetermined moving direction in a state of being opposed to the stator;

    wherein, when a direction perpendicular to the moving direction is defined to be a widthwise direction, the stator-side electrodes and the mover-side electrodes are formed into a linear pattern or a band shaped pattern along the widthwise direction; and

    both the stator-side electrodes and the mover-side electrodes have deformation patterns of a wavy shape or a mountain-and-valley shape at least in their portions;

    wherein in the stator-side electrodes and the mover-side electrodes, the deformation patterns are provided at a plurality of places along the widthwise direction; and

    a pitch dimension between deformation patterns mutually adjacent in the widthwise direction is formed larger at places away from a center line on the stator side and a center line on the mover side than at places nearer the center lines; and

    wherein the stator-side electrodes and the mover-side electrodes are formed into the same pattern shape.

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