Multipole coils

• US 20090079531A1
• Filed: 07/11/2008
• Published: 03/26/2009
• Est. Priority Date: 09/25/2007
• Status: Abandoned Application

• Current Assignee: Ceos Corrected Electron
• Original Assignee: Ceos Corrected Electron Optical Systems GmbH
• Inventors: Kallenbach, Matthias, Zach, Joachim
• Application Number:
  US12/216,857
• Publication Number:
  US 20090079531A1
• Time in Patent Office: Days
• US Class Current: 336/200
• CPC Class Codes: H01F 5/003 Printed circuit coils
• CPC Class Codes: H01J 1/50 Magnetic means for controlling the discharge
• CPC Class Codes: H01J 2237/141 Coils superconducting H01J2237/142
• CPC Class Codes: H01J 29/762 using saddle coils or printed windings coils per se H01F
• CPC Class Codes: H01J 29/768 using printed windings printed windings in general H01F27/2804; manufacturing printed coils per se H01F41/04; printed circuits and apparatus or processes for manufacturing printed circuits in general H05K1/00, e.g. H05K1/16, and H05K3/00
• CPC Class Codes: H01J 37/153 Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
• CPC Class Codes: H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes
• CPC Class Codes: H05K 1/0393 Flexible materials H05K1/038 takes precedence; specific organic compositions are classified in H05K1/0313 and subgroups
• CPC Class Codes: H05K 1/165 incorporating printed inductors
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

Multipole coils (1, 2, 3, 4, 5, 6) comprise at least two coils (1, 2) which are disposed to concentrically enclose an imaginary axis (10). Multipole coils (1, 2, 3, 4, 5, 6) of this type are designed in such a fashion that effective fields can be generated in the area of an imaginary axis (10) when little installation space is available, and the multipole coils can be reproducibly manufactured with high precision. This is achieved in that, for each coil (1, 2, 3, 4, 5, 6), at least one winding (7) is disposed on a flexible printed circuit board (8) through disposed strip conductors (9), and the printed circuit board (8) is rolled in at least one printed circuit board layer (11, 12, 13, 14).

Claims

1. Multipole coils comprising:

a first coil; and

at least one second coil, wherein said first and said second coils are disposed to concentrically enclose an imaginary axis, each of said first and said second coils having at least one winding disposed on a flexible printed circuit board via strip conductors, said printed circuit board being rolled into at least one printed circuit board layer.

2. The multipole coils of claim 1, wherein each of said first and said second coils has windings, obtained through a spiral arrangement.

3. The multipole coils of claim 2, wherein several windings per coil are generated through several printed circuit board layers, produced by rolling.

4. The multipole coils of claim 3, wherein windings of coils of different printed circuit board layers extend in such a fashion that winding centers are always disposed along radii in a plane that extends perpendicularly to said imaginary axis.

5. The multipole coils of claim 1, wherein windings form substantially rectangular windows.

6. The multipole coils of claim 5, wherein long sides of said windows extend in an axial direction.

7. The multipole coils of claim 2, wherein said windings are spirally arranged in several printed circuit board layers, outer spiral arrangements having more windings than inner ones.

8. The multipole coils of claim 1, wherein a number of windings per printed circuit board layer is doubled by providing front and rear sides of said printed circuit board with strip conductors which form windings, wherein said strip conductors of printed circuit board layers are separated by an insulating layer.

9. The multipole coils of claim 3, wherein different planes of strip conductors are interconnected by through-connections.

10. The multipole coils of claim 1, wherein a cross-sectional surface of said strip conductors is increased through galvanic reinforcement.

11. The multipole coils of claim 3, wherein adjustment markings on said printed circuit boards are used to obtain printed circuit board layers with exact positioning of said windings of respective coils.

12. The multipole coils of claim 11, wherein said adjustment markings are bores through which a mandrel is inserted.

13. The multipole coils of claim 3, wherein said printed circuit board layers are glued to each other.

14. The multipole coils of claim 3, wherein thermally conducting materials are introduced for improving outward dissipation of heat.

15. The multipole coils of claim 1, wherein additional electric or electronic components are disposed on said printed circuit board.

16. The multipole coils of claim 1, wherein soft or hard magnetic materials are used to influence a magnetic flux in said printed circuit board.

17. The multipole coils of claim 1, wherein the coils are structured to detect alternating magnetic fields.

18. The multipole coils of claim 1, wherein the coils are structured for particle optics.

19. The multipole coils of claim 18, wherein the coils are structured to be disposed around a vacuum tube.

20. The multipole coils of claim 18, wherein the coils are used to correct aberrations.

21. The multipole coils of claim 18, wherein the coils are structured as scanning coils in a scanning electron microscope.

22. The multipole coils of claim 1, wherein winding centers of windings of each coil of a dipole are disposed on radii which form an angle of approximately 120°

with respect to the imaginary axis.

23. The multipole coils of claim 1, wherein several identical multipoles, different multipoles, dipoles, quadrupoles, hexapoles, or octupoles are disposed on said printed circuit board.

24. The multipole coils of claim 23, wherein the multipoles have separate connections for current loads.

25. The multipole coils of claim 1, wherein the coils comprise a first dipole and a second dipole which is rotated through 90°

with respect to said first dipole.

26. The multipole coils of claim 1, wherein several multipoles are distributed on several printed circuit board layers.

27. The multipole coils of claim 1, wherein several multipoles are disposed on top of each other in an axial direction.

28. The multipole coils of claim 18, wherein said printed circuit board is disposed in a beam passage opening of a lens.

29. The multipole coils of claim 28, wherein the coils are disposed in a magnetic lens between a lens boundary and a magnetic gap.

30. The multipole coils of claim 18, wherein said printed circuit board is inserted into a recess of a particle-optical component.