SEPARABLE MODULATOR
First Claim
Patent Images
1. A device comprising at least one light modulator, the light modulator comprising:
- an electrode layer located over a substrate;
an optical stack located over the substrate;
a movable mirror spaced apart from the electrode layer and optical stack by a cavity, said movable mirror having a reflective surface facing the cavity; and
a flexible layer located over the movable mirror and supporting the movable mirror, wherein a portion of the flexible layer overlying the movable mirror is spaced apart from a portion of the movable mirror by a gap.
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Abstract
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
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Citations
30 Claims
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1. A device comprising at least one light modulator, the light modulator comprising:
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an electrode layer located over a substrate; an optical stack located over the substrate; a movable mirror spaced apart from the electrode layer and optical stack by a cavity, said movable mirror having a reflective surface facing the cavity; and a flexible layer located over the movable mirror and supporting the movable mirror, wherein a portion of the flexible layer overlying the movable mirror is spaced apart from a portion of the movable mirror by a gap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of manufacturing a light modulating device, comprising:
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forming an electrode layer over a substrate; forming an optical stack over the substrate; depositing a first sacrificial layer over the electrode layer and optical stack; forming at least one mirror over the first sacrificial layer; depositing a second sacrificial layer over the mirror layer; forming a flexible layer over the second sacrificial layer; and removing the sacrificial layers. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A light modulator, comprising:
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means for conducting an electrical signal; first means for reflecting light operable in response to the conducting means; second means for reflecting at least a portion of the light incident upon said second reflecting means, said second reflecting means are substantially parallel to said first reflecting means; and means for suspending said first reflecting means, wherein a portion of the suspending means is spaced apart from a portion of the first reflecting means by a gap. - View Dependent Claims (28, 29, 30)
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Specification