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SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS

  • US 20090080759A1
  • Filed: 09/19/2008
  • Published: 03/26/2009
  • Est. Priority Date: 09/20/2007
  • Status: Active Grant
First Claim
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1. A system configured to store image data generated by scanning a wafer with an inspection system, comprising:

  • a set of processor nodes coupled to a detector of an inspection system, wherein each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer; and

    an array of storage media separately coupled to each of the processor nodes, wherein the processor nodes are further configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

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