SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS

• US 20090080759A1
• Filed: 09/19/2008
• Published: 03/26/2009
• Est. Priority Date: 09/20/2007
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Campochiaro, Cecilia, Kohli, Alpa, Balasubramanian, Lalita A., Bhaskar, Chetana, Kulkarni, Ashok, Duffy, Brian, Rosengaus, Eliezer, Maher, Chris, Khullar, Aneesh, Bhaskar, Kris, Bhattacharyya, Santosh, Mahadevan, Mohan
• Granted Patent: US 8,126,255 B2
• Time in Patent Office: Days
• US Class Current: 382/141
• CPC Class Codes: G06T 1/20 Processor architectures; Processor configuration, e.g. pipelining
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

Claims

1. A system configured to store image data generated by scanning a wafer with an inspection system, comprising:

a set of processor nodes coupled to a detector of an inspection system, wherein each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer; and

an array of storage media separately coupled to each of the processor nodes, wherein the processor nodes are further configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

2. The system of claim 1, wherein each of the arrays of the storage media comprises a redundant array of independent disk drives.

3. The system of claim 1, wherein each of the arrays of the storage media comprises computer memory.

4. The system of claim 1, wherein each of the arrays of the storage media comprises a magnetic storage system.

5. The system of claim 1, wherein the set of processor nodes is further configured as a column of processor nodes, and wherein the system further comprises one or more additional columns of processor nodes coupled to the column of processor nodes.

6. The system of claim 1, wherein each of the processor nodes comprises an image computer, and wherein the image computers are interconnected using an Advanced Switching Interconnect fabric.

7. The system of claim 6, wherein the set of processor nodes is further configured as a column of processor nodes, wherein the system further comprises an additional column of processor nodes coupled to the column of processor nodes, wherein the processor nodes in the additional column are configured to perform acquisition of the image data generated by the detector, pre-processing of the image data generated by the detector, and image buffering of the image data generated by the detector, and wherein the processor nodes in the additional column are plugged into the Advanced Switching Interconnect fabric.

8. The system of claim 1, wherein all of the image data generated by the detector during the scanning of the wafer comprises more than one terabyte of image data.

9. The system of claim 1, wherein the image data stored in the arrays of the storage media comprises raw image data.

10. The system of claim 1, wherein the image data is stored in the arrays of the storage media before defect detection is performed using the image data.

11. The system of claim 1, wherein the set of processor nodes is further configured such that the image data is stored in the arrays of the storage media as the image data is received by the set of processor nodes.

12. The system of claim 1, wherein the set of processor nodes and the arrays of the storage media are further configured as a stand alone subsystem configured to simulate the inspection system.

13. The system of claim 1, wherein the set of processor nodes and the arrays of the storage media can be used as a proxy for a full inspection system.

14. The system of claim 1, wherein the set of processor nodes and the arrays of the storage media are further configured to function as a stand alone subsystem that emulates a user interface of the inspection system.

15. The system of claim 1, wherein the set of processor nodes is further configured to perform one or more functions in an offline mode to simulate one or more functions that could be performed by or using the inspection system.

16. The system of claim 1, wherein the set of processor nodes and the arrays of the storage media are further configured as a virtual inspection system.

17. The system of claim 1, wherein the set of processor nodes is further configured to combine the image data stored in the arrays of the storage media with a stream of image data as the stream of image data is generated by the detector and received by the set of processor nodes.

18. The system of claim 1, wherein the set of processor nodes and the arrays of the storage media are embedded in the inspection system.

19. The system of claim 1, wherein the set of processor nodes is further configured to generate an image of the entire wafer using all of the image data generated by the detector during the scanning of the wafer that is stored in the arrays of the storage media.

20. The system of claim 1, wherein the wafer comprises a patterned wafer.

21. The system of claim 1, wherein the set of processor nodes is further configured to use the image data stored in the arrays of the storage media to allow a user to navigate through an image of the entire wafer without using the physical wafer for navigation.

22. The system of claim 1, wherein the set of processor nodes is further configured to archive images of the wafer acquired in multiple imaging modes of the inspection system, and wherein the archived images can be used for mode selection for an inspection recipe.

23. The system of claim 1, wherein the set of processor nodes is further configured to tune an inspection recipe using the image data stored in the arrays of the storage media.

24. The system of claim 1, wherein the set of processor nodes is further configured to select one or more defect detection parameters for inspection of the wafer using all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer that is stored in the arrays of the storage media.

25. The system of claim 1, wherein the set of processor nodes is further configured to select one or more defect detection parameters for inspection of the wafer using the image data generated by the detector during the scanning of the wafer that is stored in the arrays of the storage media without requiring additional image data generated by performing additional scanning of the wafer.

26. The system of claim 1, wherein the set of processor nodes is further configured to select one or more defect detection parameters for inspection of the wafer by identifying two or more different types of regions on the wafer using the image data stored in the arrays of the storage media and by separately determining the one or more defect detection parameters for the two or more different types of regions using the image data stored in the arrays of the storage media.

27. The system of claim 1, wherein the inspection system is configured as a bright field small pixel inspection system, and wherein the set of processor nodes is further configured to archive images of wafers generated by the inspection system.

28. The system of claim 1, wherein the set of processor nodes is further configured to perform offline image analysis of the image data stored in the arrays of the storage media to identify an inspection sample plan for another inspection system that has a lower throughput and higher resolution than the inspection system.

29. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer only after all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored.

30. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer only after all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored, wherein defect detection is performed by applying a defect detection algorithm to the image data, and wherein the defect detection algorithm is selected regardless of the speed at which the defect detection algorithm can be applied to the image data.

31. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer by applying two or more defect detection algorithms to the image data stored in the arrays of the storage media, and wherein the two or more defect detection algorithms are different in at least one parameter of the two or more defect detection algorithms.

32. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer by processing the image data stored in the arrays of the storage media in multiple passes.

33. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer by processing the image data stored in the arrays of the storage media in multiple passes, and wherein one of the multiple passes comprises identifying one or more portions of the image data corresponding to one or more regions of interest on the wafer.

34. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer by processing the image data stored in the arrays of the storage media in multiple passes, and wherein one of the multiple passes comprises applying one or more algorithms to the image data to extract the defects and suppress detection of false defects.

35. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer using multiple streams of image data stored in the array of the storage media.

36. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer using multiple streams of image data, wherein one of the multiple streams comprises the image data stored in the arrays of the storage media, wherein another of the multiple streams comprises image data generated by the detector during additional scanning of the wafer, and wherein the scanning and the additional scanning are performed with one or more different parameters of the inspection system.

37. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer using multiple streams of data, and wherein the multiple streams comprise the image data stored in the arrays of the storage media, statistical data for the wafer, and design data for the wafer.

38. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer using multiple streams of data, wherein one of the multiple streams comprises the image data stored in the arrays of the storage media, and wherein another of the multiple streams comprises data not acquired by the inspection system.

39. The system of claim 1, wherein the set of processor nodes is further configured to perform wafer inspection using a die context map stored in the arrays of the storage media for binning of defects detected during the wafer inspection and for determining sensitivity regions for the wafer inspection.

40. The system of claim 1, wherein the set of processor nodes is further configured to generate a die context map from design layout generated offline and to store the resulting die context map in the arrays of the storage media.

41. The system of claim 1, wherein the set of processor nodes is further configured to generate a die context map using image processing algorithms to process a wafer image previously stored in the arrays of the storage media and to store the die context map in the arrays of the storage media.

42. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer using the image data stored in the arrays of the storage media by comparing a portion of the image data corresponding to a die on the wafer to a standard reference die and by comparing a different portion of the image data corresponding to the die on the wafer to a corresponding portion of the image data corresponding to a different die on the wafer.

43. The system of claim 1, wherein the set of processor nodes is further configured to detect defects on the wafer using the image data stored in the arrays of the storage media by comparing a portion of the image data corresponding to a die on the wafer to another portion of the image data corresponding to a different die on the wafer, and wherein the portion of the image data and the other portion of the image data are included in a single stream of the image data.

44. The system of claim 1, wherein the set of processor nodes is further configured to generate a standard reference die using image data for two or more dies on one or more wafers and to store the standard reference die in the arrays of the storage media.

45. The system of claim 1, wherein the set of processor nodes is further configured to perform wafer inspection by comparing image data corresponding to a die on the wafer to a standard reference die, and wherein the image data corresponding to the die on the wafer and the standard reference die are stored in the arrays of the storage media.

46. The system of claim 1, wherein the set of processor nodes is further configured to perform wafer inspection by comparing a standard reference die stored in the arrays of the storage media to image data corresponding to a die on the wafer as the image data corresponding to the die is received from the detector.

47. The system of claim 1, wherein the set of processor nodes is further configured to perform wafer property signature analysis using the image data stored in the arrays of the storage media.

48. The system of claim 1, wherein the set of processor nodes is further configured to generate an image of the entire wafer using all of the image data generated by the detector during the scanning of the wafer that is stored in the arrays of the storage media, and wherein the set of processor nodes is further configured to perform local image processing of the image and non-local image processing of the image.

49. The system of claim 1, wherein the set of processor nodes is further configured to perform processing of the image data stored in the arrays of the storage media and to use results of said processing to determine if additional image data for the wafer is to be acquired by scanning the wafer or from the arrays of the storage media.

50. The system of claim 1, wherein the set of processor nodes is further configured to generate an image of the wafer using the image data stored in the arrays of the storage media and at least one additional source of data for the wafer.

51. The system of claim 1, wherein the set of processor nodes is further configured to compare the image data for the wafer stored in the arrays of the storage media with image data for another wafer.

52. The system of claim 1, wherein the set of processor nodes is further configured to compare the image data for the wafer stored in the arrays of the storage media with image data for another wafer, and wherein the wafer and the other wafer are processed using different values for at least one wafer-level parameter of a process.

53. The system of claim 1, wherein the set of processor nodes is further configured to generate an image of the entire wafer using all of the image data generated by the detector during the scanning of the wafer that is stored in the arrays of the storage media, and wherein the set of processor nodes is further configured to send the image to a review system on which defects on the wafer are to be reviewed such that the image and output for the wafer generated by the review system can be used to select one or more defect detection parameters for inspection of the wafer using the image of the entire wafer and without requiring additional image data generated by the inspection system.

54. The system of claim 1, wherein the set of processor nodes is further configured to use the image data stored in the arrays of the storage media and results of electrical testing to determine if one or more characteristics of the wafer are causally related to the results of the electrical testing.

55. The system of claim 1, wherein the set of processor nodes is further configured to use the image data stored in the arrays of the storage media and results of electrical testing to select one or more defect detection parameters for inspection of the wafer, and wherein the inspection is to be performed using the image data stored in the arrays of the storage media.

56. The system of claim 1, wherein the set of processor nodes is further configured to use the image data stored in the arrays of the storage media and results of electrical testing to determine the likelihood that defects on the wafer caused the results of the electrical testing.

57. The system of claim 1, wherein the set of processor nodes is further configured to use the image data stored in the arrays of the storage media, results of the electrical testing, design data, and netlist data to determine a likelihood that defects on the wafer caused the results of the electrical testing.

58. The system of claim 1, wherein the set of processor nodes is further configured to alter one or more parameters of an inspection process to be performed on the image data stored in the arrays of the storage media using results of electrical testing in combination with mapping of the results of electrical testing to physical locations on the wafer.

59. The system of claim 1, wherein the set of processor nodes is further configured to use the image data stored in the arrays of the storage media and results of electrical testing to determine a likelihood that defects on the wafer caused the results of the electrical testing, and wherein the set of processor nodes is further configured to determine one or more parameters of physical analysis to be performed on the wafer based on the likelihood.

60. The system of claim 1, wherein the image data is generated by the detector during the scanning of the wafer using more than one optical configuration of the inspection system.

61. An inspection system configured to detect defects on a wafer, comprising:

an inspection subsystem configured to generate image data for a wafer by scanning the wafer;

a set of processor nodes coupled to the inspection subsystem, wherein each of the processor nodes is configured to receive a portion of the image data generated by the inspection subsystem during the scanning of the wafer, and wherein each of the processor nodes is further configured to detect defects on the wafer using the portion of the image data received by each of the processor nodes; and

an array of storage media separately coupled to each of the processor nodes, wherein the processor nodes are further configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the inspection subsystem during the scanning of the wafer is stored in the arrays of the storage media.

62. A method for storing image data generated by scanning a wafer with an inspection system, comprising:

separately receiving different portions of image data generated by a detector of an inspection system during scanning of a wafer; and

separately sending the different portions or selected portions of the different portions to different arrays of storage media such that all of the image data or a selected portion of the image data generated by the detector during the scanning of the wafer is stored in the different arrays of the storage media.