TEMPERATURE CONTROL APPARATUS, PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD
First Claim
1. An temperature control apparatus comprising:
- a resistance heater having characteristics that a resistance value of the resistance heater changes dependently on a temperature thereof;
a fixed resistance connected to the resistance heater in series;
a signal generator to output a control signal which has two voltage levels of a first voltage and a second voltage;
a switching section to flow a current through the resistance heater and the fixed resistance when the voltage level of the control signal is the first voltage, and not to flow a current through the resistance heater and the fixed resistance when the voltage level of the control signal is the second voltage; and
a first voltage measuring instrument to measure a voltage value across the fixed resistance at the time when the current flows through the fixed resistance,wherein the signal generator controls the temperature of the resistance heater based on the measured voltage by the first voltage measuring instrument.
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Accused Products
Abstract
Disclosed is an temperature control apparatus including: a resistance heater a resistance value of which changes dependently on a temperature thereof; a fixed resistance connected to the resistance heater in series; a signal generator to output a control signal which has two voltage levels of a first voltage and a second voltage; a switching section to flow a current through the resistance heater and the fixed resistance when the voltage level is the first voltage, and not to flow a current through the resistance heater and the fixed resistance when the voltage level is the second voltage; and a first voltage measuring instrument to measure a voltage value across the fixed resistance at the time when the current flows through the fixed resistance, wherein the signal generator controls the temperature of the resistance heater based on the measured voltage by the first voltage measuring instrument.
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Citations
22 Claims
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1. An temperature control apparatus comprising:
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a resistance heater having characteristics that a resistance value of the resistance heater changes dependently on a temperature thereof; a fixed resistance connected to the resistance heater in series; a signal generator to output a control signal which has two voltage levels of a first voltage and a second voltage; a switching section to flow a current through the resistance heater and the fixed resistance when the voltage level of the control signal is the first voltage, and not to flow a current through the resistance heater and the fixed resistance when the voltage level of the control signal is the second voltage; and a first voltage measuring instrument to measure a voltage value across the fixed resistance at the time when the current flows through the fixed resistance, wherein the signal generator controls the temperature of the resistance heater based on the measured voltage by the first voltage measuring instrument. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A processing apparatus, supplied a raw material, subjected to temperature control thereof, causing a reaction or a phase change of the raw material, the apparatus comprising:
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a processing device to cause the reaction or the phase change of the raw material; and a temperature control apparatus including; a resistance heater provided in the processing device to heat the processing device, the resistance heater having characteristics such that a resistance value of the resistance heater changes dependently on a temperature thereof; a fixed resistance connected to the resistance heater in series; a signal generator to output a control signal which has two voltage levels of a first voltage and a second voltage; a switching section to flow a current through the resistance heater and the fixed resistance when the voltage level of the control signal is the first voltage, and not to flow a current through the resistance heater and the fixed resistance when the voltage level of the control signal is the second voltage; and a first voltage measuring instrument to measure a voltage value across the fixed resistance at the time when the current flows through the fixed resistance, wherein the signal generator controls the temperature of the resistance heater based on the measured voltage by the first voltage measuring instrument. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A temperature control method for controlling a temperature of the resistance heater having characteristics that a resistance value of the resistance heater changes dependently on a temperature thereof, the temperature control method comprising:
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outputting a control signal which has two voltage levels of a first voltage and a second voltage; flowing a current through the resistance heater and the fixed resistance connected to the resistance heater in series when the voltage level of the control signal is the first voltage and shutting off a current flowing through the resistance heater and the fixed resistance when the voltage level of the control signal is the second voltage; measuring a voltage value across the fixed resistance at the time when the control signal is in the first voltage; and controlling the control signal based on the voltage value measured by the measuring step to control the temperature of the resistance heater. - View Dependent Claims (21, 22)
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Specification