Gas Electron Multiplier and Manufacturing Method for Gas Electron Multiplication Foil Used for Same as Well as Radiation Detector Using Gas Electron Multiplier
First Claim
1. A gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
- a chamber filled with gas; and
a single gas electron multiplication foil arranged in the said chamber, whereinthe said gas electron multiplication foil is made of a plate-like multilayer body composed of a plate-like insulation layer made of a macromolecular polymer material having a thickness of 100 mm to 300 mm and flat metal layers overlaid on both surfaces of the said insulation layer, andthe said plate-like multilayer body is provided with a through-hole structure.
1 Assignment
0 Petitions
Accused Products
Abstract
To attain objects to reduce the spread of electrons as compared with a conventional one without degrading the multiplication factor of electrons; to provide a large electron multiplication factor; and to improve positional resolution, there is provided a gas electron multiplier using interaction between radiation and gas through photoelectric effects including: a chamber filled with gas and a single gas electron multiplication foil arranged in the chamber wherein the gas electron multiplication foil is made of a plate-like multilayer body composed by having a plate-like insulation layer made of a macromolecular polymer material having a thickness of around 100 μm to 300 μm and flat metal layers overlaid on both surfaces of the insulation layer, and the plate-like multilayer body is provided with a through-hole structure.
17 Citations
8 Claims
-
1. A gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
-
a chamber filled with gas; and a single gas electron multiplication foil arranged in the said chamber, wherein the said gas electron multiplication foil is made of a plate-like multilayer body composed of a plate-like insulation layer made of a macromolecular polymer material having a thickness of 100 mm to 300 mm and flat metal layers overlaid on both surfaces of the said insulation layer, and the said plate-like multilayer body is provided with a through-hole structure. - View Dependent Claims (4)
-
-
2. A gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
-
a chamber filled with gas; and a single gas electron multiplication foil arranged in the said chamber, wherein the said gas electron multiplication foil is made of a plate-like multilayer body which is composed of a multilayer body where multiple plate-like insulation layers made of a macromolecular polymer material are stacked with a flat metal layer sandwiched in between and flat metal layers overlaid on both surfaces of said multilayer body, and the said plate-like multilayer is provided with a through-hole structure. - View Dependent Claims (3, 7, 8)
-
-
5. A manufacturing method for a gas electron multiplication foil used in a gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
-
overlaying flat metal layers on both surfaces of a plate-like insulation layer made of a macromolecular polymer material having a thickness of 100 mm to 300 mm; etching the said metal layers to a predetermined pattern; removing the said insulating film through irradiation with a laser beam applied perpendicularly to the plane of the said metal layers in accordance with the said predetermined pattern; creating a through-hole extending in the direction perpendicular to the plane of the said metal layers; and carrying out a desmear process using plasma and a chemical on surfaces of the said metal layers and a wall surface of the through-hole in the said insulation layers.
-
-
6. A manufacturing method for a gas electron multiplication foil used in a gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
-
overlaying flat metal layers on both surfaces of a plate-like insulation layer made of a macromolecular polymer material having a thickness of 50 mm to 300 mm; etching the said metal layers to a predetermined pattern; stacking a resultant of overlaying a flat metal layer on one surface of a plate-like insulation layer, which is made of a macromolecular polymer material having a thickness of 50 mm to 300 mm, on one or both surfaces of the said metal layers; etching outermost metal layers of the resultant obtained in the stacking step in accordance with the said predetermined pattern; removing all of the said insulating films through irradiation with a laser beam applied perpendicularly to the plane of said outermost metal layers in accordance with the said predetermined pattern; creating a through-hole extending in the direction perpendicular to the plane of the metal layers on the said outermost surfaces; and carrying out a desmear process using plasma and a chemical on surfaces of the said metal layers and a wall surface of the through-hole in the said insulation layers.
-
Specification