CARBON NANOTUBE MEMS ASSEMBLY

• US 20090085426A1
• Filed: 09/26/2008
• Published: 04/02/2009
• Est. Priority Date: 09/28/2007
• Status: Active Grant

• Current Assignee: Brigham Young University (The Church of Jesus Christ of Latter-Day Saints)
• Original Assignee: Brigham Young University (The Church of Jesus Christ of Latter-Day Saints)
• Inventors: Davis, Robert C., Vanfleet, Richard R., Hutchison, David N.
• Granted Patent: US 8,736,138 B2
• Time in Patent Office: Days
• US Class Current: 310/306
• CPC Class Codes: B81B 2201/018 Switches not provided for in B81B2201/014 - B81B2201/016
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81C 1/00031 Regular or irregular arrays of nanoscale structures, e.g. etch mask layer photomechanical, e.g. photolithographic, production of textured or patterned surfaces G03F7/00; lithographic processes for making patterned surfaces using printing and stamping G03F7/0002
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/20 Nanotubes characterized by their properties
• CPC Class Codes: C01B 2202/34 Length
• CPC Class Codes: C01B 2202/36 Diameter
• CPC Class Codes: C01B 32/16 Preparation
• CPC Class Codes: C01B 32/168 After-treatment
• CPC Class Codes: H01J 5/18 Windows permeable to X-rays, gamma-rays, or particles
• CPC Class Codes: Y10T 428/24273 including aperture

Abstract

A carbon nanotube MEMS assembly comprises a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device. An interstitial material at least partially binds adjacent carbon nanotubes one to another. At least one component of the frame is fixed and at least one component of the frame is movable relative to the fixed component.

Claims

1. A carbon nanotube MEMS assembly, comprising:

a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device;

an interstitial material, at least partially binding adjacent carbon nanotubes one to another; and

at least one component of the frame being fixed and at least one component of the frame being movable relative to the fixed component.

2. The MEMS assembly of claim 1, wherein the at least one fixed component is attached to a substrate.

3. The MEMS assembly of claim 1, wherein the nanotubes are arranged in a generally linear orientation.

4. The MEMS assembly of claim 3, wherein adjacent nanotubes are interlocked one with another.

5. The MEMS assembly of claim 3, wherein the nanotubes oriented into the frame define in the frame an interstitial material access hole extending from a face of the frame to a base of the frame and being substantially devoid of nanotubes.

6. The MEMS assembly of claim 5, wherein the interstitial material access hole includes a diameter larger than a spacing between adjacent nanotubes.

7. The MEMS assembly of claim 1, wherein the assembly comprises a thermomechanical in-plane micro actuator.

8. The MEMS assembly of claim 1, wherein the assembly comprises a comb drive.

9. The MEMS assembly of claim 1, wherein the assembly comprises a bistable mechanism.

10. A method of forming a carbon nanotube MEMS assembly, comprising:

applying a catalyst to a substrate to create a defined pattern on the substrate;

initiating growth of a plurality of carbon nanotubes from the catalyst applied in the pattern to form a patterned frame, the patterned frame including at least two components of a MEMS device; and

releasing from the substrate at least one component of the MEMS device while leaving at least one component of the MEMS device fixed relative to the released component.

11. The method of claim 10, wherein leaving the at least one component of the MEMS device fixed includes leaving the fixed component attached to the substrate.

12. The method of claim 10, wherein the nanotubes are grown in a generally vertical orientation.

13. The method of claim 10, wherein the nanotubes are grown interlocked one with another.

14. The method of claim 10, wherein applying the catalyst to the substrate includes applying the catalyst around an area devoid of catalyst to thereby form a vertically extending void in the carbon nanotubes as the nanotbues are grown from the substrate.

15. The method of claim 10, wherein the assembly comprises a thermomechanical in-plane microactuator.

16. The method of claim 10, wherein the assembly comprises a comb drive.

17. The method of claim 10, wherein the assembly comprises a bistable mechanism.