CARBON NANOTUBE MEMS ASSEMBLY
First Claim
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1. A carbon nanotube MEMS assembly, comprising:
- a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device;
an interstitial material, at least partially binding adjacent carbon nanotubes one to another; and
at least one component of the frame being fixed and at least one component of the frame being movable relative to the fixed component.
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Abstract
A carbon nanotube MEMS assembly comprises a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device. An interstitial material at least partially binds adjacent carbon nanotubes one to another. At least one component of the frame is fixed and at least one component of the frame is movable relative to the fixed component.
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Citations
17 Claims
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1. A carbon nanotube MEMS assembly, comprising:
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a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device; an interstitial material, at least partially binding adjacent carbon nanotubes one to another; and at least one component of the frame being fixed and at least one component of the frame being movable relative to the fixed component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of forming a carbon nanotube MEMS assembly, comprising:
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applying a catalyst to a substrate to create a defined pattern on the substrate; initiating growth of a plurality of carbon nanotubes from the catalyst applied in the pattern to form a patterned frame, the patterned frame including at least two components of a MEMS device; and releasing from the substrate at least one component of the MEMS device while leaving at least one component of the MEMS device fixed relative to the released component. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification