METHOD FOR DEPOSITING FILMS USING GAS CLUSTER ION BEAM PROCESSING
First Claim
1. A method for depositing a thin film at a surface on a substrate, comprising:
- maintaining a reduced-pressure environment around a substrate holder for holding a substrate having a surface;
holding said substrate securely within said reduced-pressure environment;
providing to said reduced-pressure environment a gas cluster ion beam (GCIB) from a pressurized gas mixture comprising a silicon-containing specie and at least one of a nitrogen-containing specie or a carbon-containing specie;
accelerating said GCIB; and
irradiating said accelerated GCIB onto at least a portion of said surface of said substrate to form a thin film containing silicon and at least one of nitrogen or carbon.
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Accused Products
Abstract
A method for depositing material on a substrate is described. The method comprises maintaining a reduced-pressure environment around a substrate holder for holding a substrate having a surface, and holding the substrate securely within the reduced-pressure environment. Additionally, the method comprises providing to the reduced-pressure environment a gas cluster ion beam (GCIB) from a pressurized gas mixture, accelerating the GCIB, and irradiating the accelerated GCIB onto at least a portion of the surface of the substrate to form a thin film. In one embodiment, the pressurized gas mixture comprises a silicon-containing specie and at least one of a nitrogen-containing specie or a carbon-containing specie for forming a thin film containing silicon and at least one of nitrogen or carbon. In another embodiment, the gas mixture comprises a metal-containing specie for forming a thin metal-containing film. In yet another embodiment, the pressurized gas mixture comprises a fluorocarbon-containing specie for forming a thin fluorocarbon-containing film.
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Citations
54 Claims
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1. A method for depositing a thin film at a surface on a substrate, comprising:
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maintaining a reduced-pressure environment around a substrate holder for holding a substrate having a surface; holding said substrate securely within said reduced-pressure environment; providing to said reduced-pressure environment a gas cluster ion beam (GCIB) from a pressurized gas mixture comprising a silicon-containing specie and at least one of a nitrogen-containing specie or a carbon-containing specie; accelerating said GCIB; and irradiating said accelerated GCIB onto at least a portion of said surface of said substrate to form a thin film containing silicon and at least one of nitrogen or carbon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for depositing a thin film at a surface on a substrate, comprising:
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maintaining a reduced-pressure environment around a substrate holder for holding a substrate having a surface; holding said substrate securely within said reduced-pressure environment; providing to said reduced-pressure environment a gas cluster ion beam (GCIB) from a pressurized gas mixture comprising a metal-containing specie; accelerating said GCIB; and irradiating said accelerated GCIB onto at least a portion of said surface of said substrate to form a metal-containing thin film. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A method for depositing a thin film at a surface on a substrate, comprising:
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maintaining a reduced-pressure environment around a substrate holder for holding a substrate having a surface; holding said substrate securely within said reduced-pressure environment; providing to said reduced-pressure environment a gas cluster ion beam (GCIB) from a pressurized gas mixture comprising a fluorocarbon-containing specie; accelerating said GCIB; and irradiating said accelerated GCIB onto at least a portion of said surface of said substrate to form a fluorocarbon-containing thin film. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
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Specification