METHOD FOR FABRICATING RECESS GATE IN SEMICONDUCTOR DEVICE
First Claim
1. A method for fabricating a recess gate in a semiconductor device, the method comprising:
- etching a silicon substrate to form a trench that defines an active region;
forming a device isolation layer that gap-fills the trench;
forming a hard mask layer over the silicon substrate, the hard mask layer comprising a stack of an oxide layer and an amorphous carbon layer, wherein the hard mask layer exposes a channel target region of the active region; and
forming a recess region with a dual profile by first etching and second etching the channel target region using the hard mask layer as an etch barrier,wherein the second etching is performed after removing the amorphous carbon layer.
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Abstract
A method for fabricating a recess gate in a semiconductor device includes etching a silicon substrate to form a trench that defines an active region, forming a device isolation layer that gap-fills the trench, forming a hard mask layer over the silicon substrate, the hard mask layer comprising a stack of an oxide layer and an amorphous carbon layer, wherein the hard mask layer exposes a channel target region of the active region, and forming a recess region with a dual profile by first etching and second etching the channel target region using the hard mask layer as an etch barrier, wherein the second etching is performed after removing the amorphous carbon layer.
165 Citations
23 Claims
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1. A method for fabricating a recess gate in a semiconductor device, the method comprising:
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etching a silicon substrate to form a trench that defines an active region; forming a device isolation layer that gap-fills the trench; forming a hard mask layer over the silicon substrate, the hard mask layer comprising a stack of an oxide layer and an amorphous carbon layer, wherein the hard mask layer exposes a channel target region of the active region; and forming a recess region with a dual profile by first etching and second etching the channel target region using the hard mask layer as an etch barrier, wherein the second etching is performed after removing the amorphous carbon layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for forming a recess channel in a semiconductor device, the method comprising:
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forming a hard mask layer over a semiconductor substrate, the hard mask layer comprising a stack of a passivation layer and an amorphous carbon layer, wherein the hard mask layer exposes a channel target region of the semiconductor substrate; etching the channel target region using the amorphous carbon layer as an etch barrier to form a first recess region; removing the amorphous carbon layer; and etching a bottom of the first recess region using the passivation layer as an etch barrier to form a second recess region. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A method for fabricating a recess gate in a semiconductor device, the method comprising:
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etching a silicon substrate to form a trench that defines an active region; forming a device isolation layer in the trench; forming a hard mask layer over the silicon substrate, the hard mask layer comprising an oxide layer and an amorphous carbon layer, wherein the hard mask layer exposes a channel target region of the active region; first etching the channel target region using the amorphous carbon layer as an etch barrier to form a first recess region; removing the amorphous carbon layer; second etching a bottom of the first recess region using the oxide layer as an etch barrier to form a second recess region, wherein the second recess region is wider than the first recess region. - View Dependent Claims (21)
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22. A method for forming a recess channel in a semiconductor device, the method comprising:
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forming a hard mask layer over a semiconductor substrate, the hard mask layer comprising a passivation layer and an amorphous carbon layer, wherein the hard mask layer exposes a channel target region of the semiconductor substrate; etching the channel target region using the amorphous carbon layer as an etch barrier to form a first recess region; removing the amorphous carbon layer; and etching a bottom of the first recess region using the passivation layer as an etch barrier to form a second recess region, wherein the second recess region is wider than the first recess region. - View Dependent Claims (23)
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Specification