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METHOD OF FORMING FINE PATTERNS AND MANUFACTURING SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE SAME

  • US 20090087994A1
  • Filed: 09/26/2008
  • Published: 04/02/2009
  • Est. Priority Date: 09/28/2007
  • Status: Active Grant
First Claim
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1. A method of forming a fine pattern, the method comprising:

  • providing a c-plane hexagonal semiconductor crystal;

    forming a mask having a predetermined pattern on the semiconductor crystal;

    dry-etching the semiconductor crystal by using the mask to form a first fine pattern on the semiconductor crystal; and

    wet-etching the semiconductor crystal including the first fine pattern to expand the first fine pattern in a horizontal direction to form a second fine pattern,wherein the second fine pattern obtained in the wet-etching the semiconductor crystal has a bottom surface and a sidewall that have unique crystal planes, respectively.

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