Precision Flow Control System
First Claim
1. A low flow rate precision flow controller system comprising:
- (a) a plurality of fluid supplies in fluid communication with a fluid outlet so that a plurality of fluids mix to yield mixed fluids before flowing through the outlet;
(b) a pressure source for each fluid, each pressure source applying pressure to the respective fluid;
(c) a flowmeter for each fluid, each fluid detecting the flow rate of the respective fluid; and
(d) a controller for each pressure source in communication with the respective flowmeter and the respective pressure source wherein the controller compares the respective measured flow rate to a respective desired flow rate and adjusts the respective pressure source so that the respective fluid flows at the respective desired flow rate, wherein the fluids flow out of the fluid outlet at a flow rate of less than approximately 100 microliters/minute.
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Accused Products
Abstract
A precision flow controller is capable of providing a flow rate less than 100 microliters/minute and varying the flow rate in a prescribed manner that is both predictable and reproducible where the accuracy and precision of the flowrate is less than 5% of the flow rate. A plurality of variable pressure fluid supplies pump fluid through a single outlet. Flowmeters measure the flow rates and a controller compares the flow rates to desired flowrates and, if necessary, adjusts the plurality of variable pressure fluid supplies so that the variable pressure fluid supplies pump fluid at the desired flow rate. The variable pressure fluid supplies can be pneumatically driven.
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Citations
15 Claims
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1. A low flow rate precision flow controller system comprising:
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(a) a plurality of fluid supplies in fluid communication with a fluid outlet so that a plurality of fluids mix to yield mixed fluids before flowing through the outlet; (b) a pressure source for each fluid, each pressure source applying pressure to the respective fluid; (c) a flowmeter for each fluid, each fluid detecting the flow rate of the respective fluid; and (d) a controller for each pressure source in communication with the respective flowmeter and the respective pressure source wherein the controller compares the respective measured flow rate to a respective desired flow rate and adjusts the respective pressure source so that the respective fluid flows at the respective desired flow rate, wherein the fluids flow out of the fluid outlet at a flow rate of less than approximately 100 microliters/minute. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A low flow rate precision flow controller system comprising:
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(a) a plurality of fluid supplies in fluid communication with a fluid outlet so that a plurality of fluids mix before flowing through the outlet; (b) a pressure source for each fluid applying pressure to the respective fluid; (c) a flowmeter for each fluid for measuring the flow rate of the respective fluids; wherein the flowmeter comprises; (i) a metering capillary having a sufficiently long length and a sufficiently small inner diameter so that the pressure drop across the metering capillary is at least 5% of the input pressure to the metering capillary at the desired flow rate; and (ii) a pressure sensor for measuring the pressure drop across the metering capillary; and (d) a controller for each pressure source in communication with the respective flowmeter and the respective pressure source wherein the controller compares the respective measured flow rate to a respective desired flow rate and adjusts the respective pressure source so that the respective fluid flows at the respective desired flow rate, wherein the fluids flow out of the fluid outlet at a flow rate of less than approximately 100 microliters/minute.
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Specification