CIRCUIT BOARD, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
First Claim
Patent Images
1. A circuit board comprising:
- a base composed of an insulating material; and
an electrode disposed on the base and connected to a solder ball composed of a lead free material, the electrode comprising;
a first layer containing copper as a main component and formed on the base;
a second layer containing nickel as a main component and formed on the first layer; and
a third layer containing an alloy of tin and nickel as a main component and formed on the second layer.
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Abstract
There is provided a circuit board to which a solder ball composed of a lead (Pb)-free solder is to be connected, a semiconductor device including an electrode and a solder ball composed of a lead (Pb)-free solder disposed on the electrode, and a method of manufacturing the semiconductor device, in which mounting reliability can be improved by enhancing the bonding strength (adhesion strength) between the solder ball composed of a lead (Pb)-free solder and the electrode.
22 Citations
20 Claims
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1. A circuit board comprising:
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a base composed of an insulating material; and an electrode disposed on the base and connected to a solder ball composed of a lead free material, the electrode comprising; a first layer containing copper as a main component and formed on the base; a second layer containing nickel as a main component and formed on the first layer; and a third layer containing an alloy of tin and nickel as a main component and formed on the second layer. - View Dependent Claims (2, 3, 4, 5)
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6. A semiconductor device comprising
a base; -
a first electrode formed on the base; and a solder ball composed of lead free solder and formed on the first electrode, wherein the first electrode comprises; a first layer containing copper as a main component; a second layer containing nickel as a main component and formed on the first layer; and a third layer containing an alloy of tin and nickel as a main component and formed on the second layer. - View Dependent Claims (7, 8, 9, 10, 11)
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12. A method for manufacturing a semiconductor device, the method comprising steps of:
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forming a first electrode on a base; and forming a solder ball composed of lead free solder on the first electrode, wherein the step of forming the first electrode comprises steps of; forming a first layer containing copper as a main component on the base; forming a second layer containing nickel as a main component on the first layer; forming a third layer containing tin as a main component on the second layer; and forming a alloy layer of the second layer and the third layer by a heat treatment after the step of forming the third layer. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification