Illumination System
First Claim
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1. A coherence remover, comprising:
- a first mirror; and
a second mirror coupled to the first mirror;
wherein the coherence remover is configured to receive an input beam,wherein each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams, andwherein the intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
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Abstract
A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
44 Citations
23 Claims
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1. A coherence remover, comprising:
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a first mirror; and a second mirror coupled to the first mirror; wherein the coherence remover is configured to receive an input beam, wherein each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams, and wherein the intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A lithographic apparatus, comprising:
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a coherence remover, comprising, a first mirror, and a second mirror coupled to the first mirror, wherein the coherence remover is configured to receive an input beam, wherein each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams, and wherein the intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam; and homogenizer configured to convert the output beam into a plurality of beams. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23)
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Specification