PIEZOELECTRIC-ACTUATOR DRIVING DEVICE AND EXPOSURE APPARATUS INCLUDING THE SAME
First Claim
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1. A driving device comprising:
- a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers;
a failure detecting unit configured to detect failure of one or more of the laminated units;
a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and
a driving circuit configured to supply a current for driving to a laminated unit of the laminated units which is not detected to be faulty, on the basis of an output from the failure detecting unit.
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Abstract
A driving device includes a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers, a failure detecting unit configured to detect failure of the laminated units, a plurality of switches provided corresponding to the laminated units and configured to enable and disable current supply to the laminated units, and a driving circuit configured to supply a current for driving to a normal laminated unit of the laminated units, on the basis of an output from the failure detecting unit.
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Citations
7 Claims
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1. A driving device comprising:
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a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers; a failure detecting unit configured to detect failure of one or more of the laminated units; a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and a driving circuit configured to supply a current for driving to a laminated unit of the laminated units which is not detected to be faulty, on the basis of an output from the failure detecting unit. - View Dependent Claims (2, 3, 4, 5)
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6. An exposure apparatus comprising:
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a projection optical system configured to project a pattern of an original onto a substrate, wherein at least one optical element provided in the projection optical system is driven by a driving device comprising; a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers; a failure detecting unit configured to detect failure of one or more of the laminated units; a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and a driving circuit configured to supply a current for driving to a laminated unit of the laminated units which is not detected to be faulty, on the basis of an output from the failure detecting unit.
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7. A device manufacturing method comprising the steps of:
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exposing a substrate with an exposure apparatus; and developing the exposed substrate, wherein the exposure apparatus includes a driving device configured to drive at least one optical element provided in a projection optical system, and wherein the driving device includes; a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers; a failure detecting unit configured to detect failure of one or more of the laminated units; a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and a driving circuit configured to supply a current for driving to a laminated unit of the laminated units detected not to be faulty, on the basis of an output from the failure detecting unit.
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Specification