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PIEZOELECTRIC-ACTUATOR DRIVING DEVICE AND EXPOSURE APPARATUS INCLUDING THE SAME

  • US 20090092929A1
  • Filed: 09/30/2008
  • Published: 04/09/2009
  • Est. Priority Date: 10/09/2007
  • Status: Active Grant
First Claim
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1. A driving device comprising:

  • a plurality of laminated units formed by alternately stacking piezoelectric element layers and electrode layers;

    a failure detecting unit configured to detect failure of one or more of the laminated units;

    a plurality of switches provided corresponding to the laminated units and each configured to enable and disable current supply to one of the laminated units; and

    a driving circuit configured to supply a current for driving to a laminated unit of the laminated units which is not detected to be faulty, on the basis of an output from the failure detecting unit.

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