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TEMPERATURE CONTROLLED SHOWERHEAD

  • US 20090095220A1
  • Filed: 07/29/2008
  • Published: 04/16/2009
  • Est. Priority Date: 10/16/2007
  • Status: Active Grant
First Claim
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1. A temperature controlled showerhead for chemical vapor deposition (CVD), the showerhead comprising:

  • (a) a stem comprising a convective cooling fluid passageway;

    (b) a back plate thermally coupled to the stem;

    (c) a heater physically attached to the back plate;

    (d) a face plate thermally coupled to the back plate; and

    (e) a temperature sensor for measuring a temperature of the face plate.wherein the face plate is configured to be removably attached to the back plate via a mating feature and wherein the face plate material is an aluminum alloy resistant to chemicals and plasma.

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