TEMPERATURE CONTROLLED SHOWERHEAD
First Claim
Patent Images
1. A temperature controlled showerhead for chemical vapor deposition (CVD), the showerhead comprising:
- (a) a stem comprising a convective cooling fluid passageway;
(b) a back plate thermally coupled to the stem;
(c) a heater physically attached to the back plate;
(d) a face plate thermally coupled to the back plate; and
(e) a temperature sensor for measuring a temperature of the face plate.wherein the face plate is configured to be removably attached to the back plate via a mating feature and wherein the face plate material is an aluminum alloy resistant to chemicals and plasma.
1 Assignment
0 Petitions
Accused Products
Abstract
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
-
Citations
20 Claims
-
1. A temperature controlled showerhead for chemical vapor deposition (CVD), the showerhead comprising:
-
(a) a stem comprising a convective cooling fluid passageway; (b) a back plate thermally coupled to the stem; (c) a heater physically attached to the back plate; (d) a face plate thermally coupled to the back plate; and (e) a temperature sensor for measuring a temperature of the face plate. wherein the face plate is configured to be removably attached to the back plate via a mating feature and wherein the face plate material is an aluminum alloy resistant to chemicals and plasma. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A temperature controlled showerhead face plate for chemical vapor deposition (CVD), the face plate comprising:
-
(a) a substantially planar and circular front surface; (b) a substantially planar and circular back surface comprising a plurality of threaded blind holes and mating features for a back plate; and (c) a plurality of small through holes for gas flow; wherein the face plate is configured to be removably attached to the back plate via the mating feature and wherein the face plate material is an aluminum alloy resistant to chemicals and plasma. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
-
Specification