TEMPERATURE CONTROLLED SHOWERHEAD

• US 20090095220A1
• Filed: 07/29/2008
• Published: 04/16/2009
• Est. Priority Date: 10/16/2007
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Srinivasan, Easwar, Meinhold, Henner, Lau, Stephen, Doble, Dan M., Wilson, Vince
• Granted Patent: US 8,673,080 B2
• Time in Patent Office: Days
• US Class Current: 118/712
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/4557 Heated nozzles
• CPC Class Codes: C23C 16/45572 Cooled nozzles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32724 Temperature

Abstract

A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.

Claims

1. A temperature controlled showerhead for chemical vapor deposition (CVD), the showerhead comprising:

(a) a stem comprising a convective cooling fluid passageway;

(b) a back plate thermally coupled to the stem;

(c) a heater physically attached to the back plate;

(d) a face plate thermally coupled to the back plate; and

(e) a temperature sensor for measuring a temperature of the face plate.

wherein the face plate is configured to be removably attached to the back plate via a mating feature and wherein the face plate material is an aluminum alloy resistant to chemicals and plasma.

2. The showerhead face plate of claim 1, wherein the mating feature comprises a circumferential sidewall.

3. The showerhead face plate of claim 1, wherein the mating feature comprises a bottom half of an interlocking jaw.

4. The showerhead face plate of claim 1, wherein the face place further comprises a plurality of small through holes.

5. The showerhead face plate of claim 1, wherein the plurality of small through holes is 3-4000 through holes.

6. The showerhead face plate of claim 4, wherein the small holes form a pattern of non-uniform hole density.

7. The showerhead face plate of claim 4, wherein the plurality of small through hole diameter is about 0.01 to 0.5 inch.

8. The showerhead face plate of claim 1, wherein the thickness of the face plate is about ⅛

to ½

inches.

9. The showerhead face plate of claim 1, further comprising a thermocouple contact hole.

10. The showerhead face plate of claim 1, further comprising a plurality of spacers coupled to one or more of the threaded blind holes.

11. A temperature controlled showerhead face plate for chemical vapor deposition (CVD), the face plate comprising:

(a) a substantially planar and circular front surface;

(b) a substantially planar and circular back surface comprising a plurality of threaded blind holes and mating features for a back plate; and

(c) a plurality of small through holes for gas flow;

wherein the face plate is configured to be removably attached to the back plate via the mating feature and wherein the face plate material is an aluminum alloy resistant to chemicals and plasma.

12. The showerhead face plate of claim 11, wherein the mating feature comprises a circumferential sidewall.

13. The showerhead face plate of claim 11, wherein the mating feature comprises a bottom half of an interlocking jaw.

14. The showerhead face plate of claim 11, wherein the plurality of small through holes is 100 to 10,000 through holes.

15. The showerhead face plate of claim 11, wherein the plurality of small through holes is 3-4000 through holes.

16. The showerhead face plate of claim 11, wherein the small holes form a pattern of non-uniform hole density.

17. The showerhead face plate of claim 11, wherein the plurality of small through hole diameter is about 0.01 to 0.5 inch.

18. The showerhead face plate of claim 11, wherein the thickness of the face plate is about ⅛

to ½

inches.

19. The showerhead face plate of claim 11, further comprising a thermocouple contact hole.

20. The showerhead face plate of claim 11, further comprising a plurality of spacers coupled to one or more of the threaded blind holes.