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MULTI-GAS CONCENTRIC INJECTION SHOWERHEAD

  • US 20090095221A1
  • Filed: 10/16/2007
  • Published: 04/16/2009
  • Est. Priority Date: 10/16/2007
  • Status: Abandoned Application
First Claim
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1. A showerhead apparatus comprising:

  • a first plenum for a first precursor gas;

    a second plenum for a second precursor gas; and

    a plurality of inner and outer injection holes wherein the inner injection holes are disposed within the boundaries of the outer injection holes, the inner injection holes in fluid communication with the first plenum and the outer injection holes in fluid communication with the second plenum.

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