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LASER PROCESSING METHOD

  • US 20090095723A1
  • Filed: 09/25/2008
  • Published: 04/16/2009
  • Est. Priority Date: 10/02/2007
  • Status: Abandoned Application
First Claim
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1. A method of laser processing which laser-processes at least part of an object while supplying said object with an assist gas, said method comprising the steps of:

  • preparing said object for laser processing;

    forming a flow pathway in a process target area of said object prepared, said flow pathway making a concentration of the assist gas, passing through said flow pathway, become higher than that of the assist gas in the other area, when the assist gas is supplied to said object; and

    irradiating said process target area of said object with a laser beam of a predetermined wavelength while supplying said object with the assist gas.

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