Image Sensor and Method for Manufacturing the Same
First Claim
Patent Images
1. An image sensor comprising:
- a semiconductor substrate including a plurality of unit pixels;
first to third color filters on or over the semiconductor substrate;
first micro-lenses on the first and third color filters; and
second micro-lenses on the second color filters, in which an outer periphery of each first micro-lens has a square shape, and an upper portion of each first micro-lens has a semi-spherical or convex shape.
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Abstract
Disclosed are an image sensor and a method for manufacturing the same. The image sensor includes a semiconductor substrate including a unit pixel, first to third color filters provided on the semiconductor substrate, a first micro-lens provided on each of the first and third color filters, and a second micro-lens provided on the second color filter, in which an outer periphery of the first micro-lens has a square shape, and an upper portion of the first micro-lens has a semi-spherical or convex shape.
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Citations
18 Claims
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1. An image sensor comprising:
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a semiconductor substrate including a plurality of unit pixels; first to third color filters on or over the semiconductor substrate; first micro-lenses on the first and third color filters; and second micro-lenses on the second color filters, in which an outer periphery of each first micro-lens has a square shape, and an upper portion of each first micro-lens has a semi-spherical or convex shape. - View Dependent Claims (2, 3, 4)
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5. A method for manufacturing an image sensor, the method comprising the steps of:
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forming a plurality of unit pixels on a semiconductor substrate; forming first to third color filters on or over the semiconductor substrate; forming first micro-lenses on the first and third color filters; and forming second micro-lenses on the second color filter, wherein an outer periphery of the first micro-lenses has a square shape, and an upper portion of the first micro-lenses has a semi-spherical or convex shape. - View Dependent Claims (6, 7, 8, 9, 10)
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11. An image sensor comprising:
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a semiconductor substrate including a plurality of unit pixels; first to third color filters on the semiconductor substrate corresponding to the unit pixels; first micro-lenses on the first color filter and the third color filter; a second micro-lens on the second color filter; and a coating pattern on a surface of at least one of the color filters, wherein an upper surface of the first and second micro-lenses has a convex or semi-spherical shape, and the first and/or second micro-lenses have a square-shaped periphery. - View Dependent Claims (12, 13)
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14. A method for manufacturing an image sensor, the method comprising the steps of:
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forming a plurality of unit pixels on a semiconductor substrate; forming a color filter array including first to third color filters on the semiconductor substrate, each color filter corresponding to one of the unit pixels; forming micro-lenses on the second color filter, the micro-lenses having a spherical or convex top surface and a square-shaped outer periphery; forming a coating pattern on the surface of the micro-lenses; and forming additional micro-lenses on the first color filter and the third color filter, the additional micro-lenses having a spherical or convex top surface and a square-shaped outer periphery. - View Dependent Claims (15, 16, 17, 18)
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Specification