ACOUSTICALLY COUPLED RESONATORS AND METHOD OF MAKING THE SAME
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Abstract
An apparatus includes a substrate with a cavity and a two-stage resonator filter fabricated over the cavity. The two-stage resonator filter includes a first stage and a second stage. The first stage includes a first resonator and a second resonator, the second resonator acoustically coupled to the first resonator. The second stage includes a third resonator and a fourth resonator, the fourth resonator acoustically coupled to the third resonator. The second resonator and the third resonators are electrically coupled. A decoupling layer couples the first resonator and the second resonator. The decoupling layer extends between the third resonator and the fourth resonator. The first resonator and the fourth resonator are above the substrate. The decoupling layer is above the first resonator and the fourth resonator. The second resonator and the third resonators are above the decoupling layer.
100 Citations
16 Claims
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1-6. -6. (canceled)
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7. A method of manufacturing an apparatus, said method comprising:
- etching a cavity within a substrate, the cavity open to a first major surface of the substrate;
filling said cavity with sacrificial material;
fabricating a two-stage resonator filter above the cavity; and
removing the sacrificial material from the cavity. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
- etching a cavity within a substrate, the cavity open to a first major surface of the substrate;
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16-22. -22. (canceled)
Specification