Miniscule-Size Photo-Spectrometer Units
3 Assignments
0 Petitions
Accused Products
Abstract
Device and method for implementing a photo-spectrometer unit, PSU (20), for use with a spectrometry system (100) having optical means (12), and electronic means (13) including detection means (15, 25, 25j) and processing means (16, 26, 26k). The PSU is formed in a first manufacturing process step into a monolithic structure as a chip of substrate material (30) including integrally formed optical means, and has a first input surface (301) separated from a second receiving surface (302) by a substrate material thickness (t). Electronic means are formed onto the PSU structure in a second manufacturing process step. The substrate material is selected as a material transparent to electromagnetic radiations, and the PSU has at least one optical deflecting element (32) configured for guiding received radiations through the thickness of the substrate material, for establishing direct optical path coupling between both an element formed on one surface and an element formed on another surface of the substrate material.
19 Citations
55 Claims
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1-40. -40. (canceled)
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41. A method for manufacturing a photo-spectrometer unit for use with a spectrometry system, said photo-spectrometer unit having an upstream side and a downstream side, and said spectrometry system having a source of radiation illuminating a sample and an optical guide for guiding radiations exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:
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at least one optical element for receiving input radiations exiting from the sample, and electronic elements including; a detector formed downstream of at least one optical element and configured for receiving radiation exiting from the sample and for outputting electrical measurable signals, and a processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals, the method comprising the steps of; forming the photo-spectrometer unit as a chip of a substrate material, said chip having a monolithic structure with the at least one optical element formed integrally therefrom, and said chip having a first surface on which said at least one optical element is formed, said first surface being separated by a substrate material thickness from a second surface, and forming the electronic elements on said second surface of said chip. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48)
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49. A photo-spectrometer unit for use with a spectrometry system, said spectrometry system having an upstream side and a downstream side, and having a source of radiation for illuminating a sample and an optical guide for guiding radiations exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:
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at least one optical element for receiving input radiations exiting from the sample, and electronic elements including; a detector formed downstream of at least one optical element, the detector being configured for receiving radiations exiting from the sample and for outputting electrical measurable signals, and a processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals, said photo-spectrometer unit being formed as a chip of a substrate material, said chip having a monolithic structure with the at least one optical element formed integrally therefrom, and said chip having a first surface and a second surface separated therefrom by a substrate material thickness, said at least one optical element being formed on said first surface and said electronic elements being formed on said second surface. - View Dependent Claims (50, 51, 52, 53, 54, 55)
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Specification