ELECTROSTATIC CHUCK ASSEMBLY

• US 20090097184A1
• Filed: 10/12/2007
• Published: 04/16/2009
• Est. Priority Date: 10/12/2007
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: BUCHBERGER, DOUGLAS A. JR., Brillhart, Paul
• Granted Patent: US 7,649,729 B2
• Time in Patent Office: Days
• US Class Current: 361/234
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

The present invention generally comprises an electrostatic chuck base, an electrostatic chuck assembly, and a puck for the electrostatic chuck assembly. Precisely etching a substrate within a plasma chamber may be a challenge because the plasma within the chamber may cause the temperature across the substrate to be non-uniform. A temperature gradient may exist across the substrate such that the edge of the substrate is at a different temperature compared to the center of the substrate. When the temperature of the substrate is not uniform, features may not be uniformly etched into the various layers of the structure disposed above the substrate. A dual zone electrostatic chuck assembly may compensate for temperature gradients across a substrate surface.

Claims

1. An electrostatic chuck base, comprising:

an electrostatic chuck base body having one or more cooling channels formed within the body and a plurality of grooves formed in at least one of the one or more cooling channels.

2. The base of claim 1, wherein:

the one or more cooling channels comprise;

an inner cooling channel; and

an outer cooling channel substantially encircling the inner cooling channel; and

wherein

the plurality of grooves comprises;

one or more first grooves coupled with the inner cooling channel; and

one or more second grooves coupled with the outer cooling channel.

3. The base of claim 2, wherein the inner cooling channel is arranged in a first pattern and the outer cooling channel is arranged in a second pattern different from the first pattern.

4. The base of claim 2, wherein the inner cooling channel winds through the base and turns back upon itself a plurality of times.

5. The base of claim 4, wherein the inner cooling channel turns back upon itself about five or more times.

6. The base of claim 2, wherein a width of the one or more first grooves is substantially equal to a width of the one or more second grooves.

7. The base of claim 2, wherein a height of the one or more first grooves is substantially equal to a height of the one or more second grooves.

8. The base of claim 1, wherein at least one groove of the plurality of grooves has a varying width.

9. The base of claim 8, wherein the at least one groove having a varying width splits and encircles a lift pin opening.

10. A puck for an electrostatic chuck assembly, comprising:

a puck body; and

a plurality of mesas arranged across the puck body in at least two different patterns.

11. The puck of claim 10, wherein the puck body has a first surface adapted to receive a substrate, the first surface having an inner zone and an outer zone encircling the inner zone, the puck further comprising:

a first plurality of mesas disposed on the first surface in the inner zone and extending above the first surface, the first plurality of mesas arranged in a first pattern; and

a second plurality of mesas disposed on the first surface in the outer zone and extending above the first surface, the second plurality of mesas arranged in a second pattern different than the first pattern.

12. The puck of claim 11, wherein the inner zone and the outer zone each comprise a heat exchanging gas inlet.

13. An electrostatic chuck assembly, comprising:

a puck, the puck comprising;

a puck body; and

a plurality of mesas arranged across the puck body in at least two different patterns; and

an electrostatic chuck base body having one or more cooling channels formed within the body and a plurality of grooves formed in at least one of the one or more cooling channels.

14. The assembly of claim 13, wherein:

the one or more cooling channels comprise;

an inner cooling channel; and

an outer cooling channel substantially encircling the inner cooling channel; and

wherein

the one or more grooves comprise;

one or more first grooves coupled with the inner cooling channel; and

one or more second grooves coupled with the outer cooling channel.

15. The assembly of claim 14, wherein the inner cooling channel is arranged in a first pattern and the outer cooling channel is arranged in a second pattern different from the first pattern.

16. The assembly of claim 14, wherein the inner cooling channel winds through the base and turns back upon itself a plurality of times.

17. The assembly of claim 16, wherein the inner cooling channel turns back upon itself about five or more times.

18. The assembly of claim 14, wherein a width of the one or more first grooves is substantially equal to a width of the one or more second grooves.

19. The assembly of claim 14, wherein a height of the one or more first grooves is substantially equal to a height of the one or more second grooves.

20. The assembly of claim 13, wherein at least one groove of the plurality of grooves has a varying width.

21. The assembly of claim 20, wherein the at least one groove having a varying width splits and encircles a lift pin opening.