VISUAL INSPECTION APPARATUS

• US 20090097737A1
• Filed: 12/08/2008
• Published: 04/16/2009
• Est. Priority Date: 12/10/2004
• Status: Abandoned Application

• Current Assignee: Olympus Corporation
• Original Assignee: Olympus Corporation
• Inventors: NAIKI, Hiroshi, HASHIMOTO, Katsuyuki, TOKITA, Hiroyuki
• Application Number:
  US12/329,847
• Publication Number:
  US 20090097737A1
• Time in Patent Office: Days
• US Class Current: 382/145
• CPC Class Codes: G01N 21/8803 Visual inspection measuring projectors G01B9/08
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G06V 10/147 Details of sensors, e.g. sensor lenses fingerprint or palmprint sensors G06V40/13; vascular sensors G06V40/145; eye sensors G06V40/19
• CPC Class Codes: G06V 2201/06 Recognition of objects for industrial automation

Abstract

In a visual inspection apparatus according to the present invention, a carrier base 2 supports a substrate 1 and tilts the substrate 1. The light source 3 illuminates light onto the surface of the substrate 1. The image-pickup apparatus 4 upon capturing an image of the substrate 1 produces image data and puts them out to a control apparatus 6. The image-pickup apparatus 4 is disposed in the vicinity of an eye view position P of the inspector. The control apparatus 6 stores the image data put out from the image-capturing apparatus 4 into an internally-disposed storage section.

Claims

1. A visual inspection apparatus, comprising:

an inspection-object-holder section for conducting visual inspection of an inspection object, the inspection-object-holder section supporting the inspection object and tilting the inspection object; and

an image-capturing section for capturing an image of the inspection object and producing image data, wherein

an optical axis of the image-capturing section is disposed to substantially coincide with a line of sight of an inspector who observes the inspection object during visual inspection.

2. A visual inspection apparatus according to claim 1, further comprising:

an image-capturing holder section for supporting the image-capturing section and moving the image-capturing section, wherein

movement of the image-capturing holder section is controlled so that;

the image-capturing section is moved to a position that does not interfere with the visual observation conducted by the inspector who observes the inspection object; and

the image-capturing section is moved to a position that is identical to an eye view position of the inspector who observes the inspection object.

3. A visual inspection apparatus according to claim 1, further comprising:

an illuminating section for illuminating the inspection object, wherein

three angles formed during the visual observation and defined by;

an optical axis of the illuminating section directed toward a central position of the inspection object;

a normal disposed on the inspection object; and

a reference axis extending from the central position in an eye view direction of the inspector are identical respectively with

three angles formed during image-capturing conducted by the image-capturing section and defined by;

the optical axis of the illuminating section directed toward the central position of the inspection object;

the normal disposed on the inspection object; and

an optical axis of an image-capturing optical system of the image-capturing section directed toward the central position of the inspection object, and

the illuminating section, the central position of the inspection object, and the eye view position that are disposed during the visual observation have identical correlation with those of the illuminating section, the central position of the inspection object, and the image-capturing section that are disposed during the image-capturing using the image-capturing section.

4. A visual inspection apparatus according to claim 1, wherein

the image-capturing section is disposed at a height that is identical to the height of the eye view position of the inspector so that an angle defined by the optical axis of the image-capturing section extending in image-capturing direction and by a horizontal plane is equal to an angle defined by an axis of eye view direction of the inspector and the horizontal plane,

the visual inspection apparatus further comprising a control section, wherein

the control section puts out a signal to the inspection-object-holder section during image-capturing of the inspection object for instructing rotation of the inspection object, and

the inspection-object-holder section rotates the inspection object around a rotational axis passing through the center of the inspection object and extending in the vertical direction based on the signal put out by the control section so that an image of the inspection object visually observed by the inspector is identical with an image of the inspection object captured by the image-capturing section.

5. A visual inspection apparatus according to claim 1, further comprising:

a control section;

a light-reflective plate; and

a reflective-plate holder section for supporting the light-reflective plate and moving the light-reflective plate, wherein

the control section controls movement of the reflective-plate holder section so that;

the light-reflective plate is moved to a position that does not interfere with the visual observation conducted by the inspector who observes the inspection object; and

the light-reflective plate is moved to a position that causes an image of the inspection object captured by the image-capturing section to be identical with an image visually observed by the inspector based on light reflected by the light-reflective plate during the image-capturing for the inspection object.

6. A visual inspection apparatus according to claim 1, further comprising:

a light-reflective-and-translucent plate disposed at a position which causes an image of the inspection object captured by the image-capturing section to be identical to an image visually observed by the inspector through the light-reflective-and-translucent plate based on light reflected by the light-reflective plate.

7. A visual inspection apparatus according to claim 1, further comprising:

an illuminating section for illuminating the inspection object;

a tilt-position-storage section for storing tilting-position-associated information associated with the inspection-object-holder section;

a tilting-position-storing-and-operating section for storing the tilting-position-associated information in the tilt-position-storage section based on operation provided by the inspector who conducts visual observation for defects of the inspection object;

a section for detecting the information associated with the line of sight for a recognizing operation provided to the tilting-position-storing-and-operating section and for detecting the information associated with the line of sight of the inspector directed toward the inspection object; and

an image-capturing-movement-control section for controlling at least one of the tilting-holder section and the image-capturing-section-moving mechanism based on the tilting-position-associated information stored in the tilt-position-storage section and the information associated with the line of sight detected by the section for detecting the information associated with the line of sight;

the image-capturing-movement-control being configured to cause the position of the optical axis of the image-capturing section to be identical with the position of the line of sight of the inspector and the position of the inspection object; and

the image-capturing-movement-control section conducts an image-capturing movement for the inspection object.

8. A visual inspection apparatus according to claim 7, wherein

the section for detecting the information associated with the line of sight comprises:

an inspector'"'"'s-image-capturing section for capturing an image including the face of the inspector; and

an inspector'"'"'s-image-processing section for calculating information associated with the line of sight of the inspector by detecting the view point position of the inspector based on the image including the face captured by the inspector'"'"'s-image-capturing section.

9. A visual inspection apparatus according to claim 7, wherein

the section for detecting the information associated with the line of sight comprises:

a target-image-capturing section for capturing an image of a target provided for making a movement linking with the line of sight of the inspector; and

a target-image-processing section for calculating information associated with the line of sight of the inspector based on the image of the target captured by the target-image-capturing section.

10. A visual inspection apparatus according to claim 7, wherein

the section for detecting the information associated with the line of sight comprises:

a movable index which provides the position of the line of sight of the inspector passing between the eye view position and the inspection object during the visual observation conducted by the inspector who observes the inspection object; and

an index-position-calculating section for obtaining position-associated information of the movable index and converting the position-associated information into information associated with the line of sight of the inspector.

11. A visual inspection apparatus according to claim 7, wherein

the section for detecting the information associated with the line of sight comprises:

a position-detection sensor fixed to the inspector; and

a positional-information-calculating section for obtaining position-associated information of the position-detection sensor and converting the position-associated information into information associated with the line of sight of the inspector.