DIAPHRAGM ISOLATION FORMING THROUGH SUBTRACTIVE ETCHING
First Claim
Patent Images
1. A housing comprising:
- (a) an inside and at least one sidewall, wherein the sidewall comprises inner and outer surfaces,(b) an etch stop deposit disposed over at least a portion of the housing, and(c) a diaphragm material deposit disposed over at least a portion of the etch stop deposit.
4 Assignments
0 Petitions
Accused Products
Abstract
Described herein is a housing comprising an inside and at least one sidewall, wherein the at least one sidewall comprises inner and outer surfaces. An etch stop deposit is disposed over at least a portion of the housing, and a diaphragm material deposit is disposed over at least a portion of the etch stop deposit.
23 Citations
22 Claims
-
1. A housing comprising:
-
(a) an inside and at least one sidewall, wherein the sidewall comprises inner and outer surfaces, (b) an etch stop deposit disposed over at least a portion of the housing, and (c) a diaphragm material deposit disposed over at least a portion of the etch stop deposit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 21)
-
-
11. A method of isolating a diaphragm on a housing, the method comprising:
-
(a) depositing an etch stop deposit on at least a portion of the housing, and (b) depositing a diaphragm material deposit on at least a portion of the etch stop deposit. - View Dependent Claims (12, 13, 14, 15, 16, 17)
-
-
18. A plate comprising:
-
(a) front and back surfaces, (b) an etch stop deposit disposed on at least a portion of the front surface, and (b) a diaphragm material deposit disposed over at least a portion of the etch stop deposit, wherein at least a portion of the back surface is etched, thereby exposing at least a portion of the etch stop deposit. - View Dependent Claims (19)
-
-
20. A structure comprising:
-
(a) front and back surfaces, (b) a plurality of etch stop deposits disposed over at least a portion of the front surface, and (c) a plurality of diaphragm material deposits each disposed over at least a portion of one of the etch stop deposits, wherein portions of the back surface are etched, thereby exposing at least a portion of each of the plurality of etch stop deposits. - View Dependent Claims (22)
-
Specification