DOT-PATTERNED STRUCTURE MAGNETIC RECORDING MEDIUM AND METHOD FOR PRODUCTION THEREOF
First Claim
1. A dot-patterned structure composed of a first layer, which is continuous, and a second layer, which is discrete, whereinsaid first layer is constructed of a thin film of crystalline structure and a layer integrally formed thereon by filling lithographically formed grooves with the same material as said thin film, and said second film is formed by filling the pits, which remain after removal of the photoresist used for lithography, with a material different from the material of said thin film.
1 Assignment
0 Petitions
Accused Products
Abstract
Disclosed herein are a dot-patterned structure for magnetic recording bits and a magnetic recording medium provided therewith. The former exhibits high functionality and high performance owing to good crystallinity. The dot-patterned structure is composed of a first layer, which is continuous, and a second layer, which is discrete. The magnetic recording medium having a dot-patterned recording layer is formed by the steps of treating an underlying layer by lithography, thereby forming grooves, filling the grooves by epitaxial growth with the same material as the underlying layer, removing the photoresist used for lithography in a solvent, thereby forming pits, and filling the pits by epitaxial growth with a magnetic film as the recording layer.
-
Citations
25 Claims
-
1. A dot-patterned structure composed of a first layer, which is continuous, and a second layer, which is discrete, wherein
said first layer is constructed of a thin film of crystalline structure and a layer integrally formed thereon by filling lithographically formed grooves with the same material as said thin film, and said second film is formed by filling the pits, which remain after removal of the photoresist used for lithography, with a material different from the material of said thin film.
-
4. A method for producing a dot-patterned structure composed of a first layer, which is continuous, and a second layer, which is discrete, said method comprising the steps of
forming grooves by lithography in a thin film with crystalline structure, filling said grooves with the same material as said thin film, thereby forming said first layer, removing the photoresist used for lithography, thereby forming pits, and filling the pits with a material different from the material of said thin film, thereby forming said second layer, which is discrete.
- 8. A magnetic recording medium which comprises a substrate, an underlying layer, and a recording layer, which are arranged sequentially on top of the other, said recording layer being formed by the steps of forming grooves by lithography in said underlying layer, filling said grooves with the same material as said underlying layer, and filling pits, which remain after removal of the photoresist used for lithography, with a magnetic film.
-
12. A method for producing a magnetic recording medium having a substrate and an underlying layer, said method comprising the steps of
forming grooves by lithography in said underlying layer, filling said grooves with the same material as said underlying layer, removing the photoresist used for lithography, thereby forming pits, and filling said pits with a magnetic film as the recording layer.
- 17. A magnetic recording medium which comprises a substrate, a soft magnetic layer, an underlying layer, and a recording layer, which are arranged sequentially on top of the other, said recording layer being formed by the steps of forming grooves by lithography in said underlying layer, filling said grooves with the same material as said underlying layer, and filling pits, which remain after removal of the photoresist used for lithography, with a magnetic film.
-
21. A method for producing a magnetic recording medium which comprises the steps of
coating a substrate with a soft magnetic layer and an underlying layer sequentially, treating said underlying layer by lithography to form grooves therein, filling said grooves with the same material as said underlying layer, removing the photoresist used for lithography, thereby forming pits, and filling said pits with a magnetic film as the recording layer.
Specification