TELEMETRY METHOD AND APPARATUS USING MAGNETICALLY-DRIVEN MEMS RESONANT STRUCTURE
First Claim
1. A sensing apparatus for measuring quantities convertible from changes in physical observations, said apparatus comprising:
- a resonant structure responsive to said changes in said physical observations, said resonant structure including a magnetized element;
an electromagnetic coil operationally coupled to said magnetized element, said electromagnetic coil being an excitation coil magnetically coupled to said magnetized element to excite a resonance of said resonant structure; and
,a signal processor for processing movement of said resonant structure, said signal processor correlating said movement with regard to said changes in said physical observations so as to produce sensed data.
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Abstract
A telemetry method and apparatus using pressure sensing elements remotely located from associated pick-up, and processing units for the sensing and monitoring of pressure within an environment. This includes remote pressure sensing apparatus incorporating a magnetically-driven resonator being hermetically-sealed within an encapsulating shell or diaphragm and associated new method of sensing pressure. The resonant structure of the magnetically-driven resonator is suitable for measuring quantities convertible to changes in mechanical stress or mass. The resonant structure can be integrated into pressure sensors, adsorbed mass sensors, strain sensors, and the like. The apparatus and method provide information by utilizing, or listening for, the residence frequency of the oscillating resonator. The resonant structure listening frequencies of greatest interest are those at the mechanical structure'"'"'s fundamental or harmonic resonant frequency. The apparatus is operable within a wide range of environments for remote one-time, random, periodic, or continuous/on-going monitoring of a particular fluid environment. Applications include biomedical applications such as measuring intraocular pressure, blood pressure, and intracranial pressure sensing.
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Citations
62 Claims
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1. A sensing apparatus for measuring quantities convertible from changes in physical observations, said apparatus comprising:
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a resonant structure responsive to said changes in said physical observations, said resonant structure including a magnetized element; an electromagnetic coil operationally coupled to said magnetized element, said electromagnetic coil being an excitation coil magnetically coupled to said magnetized element to excite a resonance of said resonant structure; and
,a signal processor for processing movement of said resonant structure, said signal processor correlating said movement with regard to said changes in said physical observations so as to produce sensed data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A method of sensing physical observations within an environment, said method comprising:
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operatively arranging a resonant structure in said environment and in proximity to a direct current bias field, said resonant structure including a magnetized element and being responsive to changes in said physical observations; applying a magnetic field by way of an electromagnetic coil operationally coupled to said magnetized element; measuring a plurality of successive values for magnetic resonance intensity of said resonant structure with a signal processor operating over a range of successive interrogation frequencies to identify a resonant frequency value of said resonant structure; and using said resonant frequency value to identify sensed data correlating to said physical observation of said environment. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52, 53)
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54. An apparatus for measuring quantities convertible from changes in physical observations, said apparatus comprising:
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a resonant structure responsive to said changes in said physical observations, said resonant structure including a magnetized element; an electromagnetic coil operationally coupled to said magnetized element, said electromagnetic coil being magnetically coupled to said magnetized element; and
,a signal processor for processing movement of said resonant structure, said signal processor correlating said movement with regard to said changes in said physical observations so as to produce sensed data. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62)
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Specification