COMPOSITE SENSOR
First Claim
1. A composite sensor, characterized by comprising:
- an external holding portion;
an internal holding portion supported within said external holding portion via a coupling portion; and
a vibration-type angular velocity sensor element and an acceleration sensor element disposed within said internal holding portion,wherein said internal holding portion is held in such a manner so as to substantially suppress a movement of said acceleration sensor element along a detection direction while to allow a movement of the vibration-type angular velocity sensor element along a direction in which said vibration-type angular velocity sensor element receives Coriolis force at least by an angular velocity.
2 Assignments
0 Petitions
Accused Products
Abstract
A composite sensor includes an external holding portion 6, an internal holding portion 4 supported within the external holding portion 6 via coupling portion 5, and a vibration-type angular velocity sensor element 1 and an acceleration sensor element 2 disposed within the internal holding portion 4, and is configured so that the internal holding portion 4 is held in such a manner so as to substantially suppress a movement of the acceleration sensor element 2 along a detection direction while to allow a movement of the vibration-type angular velocity sensor element 1 in a direction in which it receives Coriolis force at least by an angular velocity. A reduction of the composite sensor in size can be achieved by this structure.
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Citations
12 Claims
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1. A composite sensor, characterized by comprising:
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an external holding portion; an internal holding portion supported within said external holding portion via a coupling portion; and a vibration-type angular velocity sensor element and an acceleration sensor element disposed within said internal holding portion, wherein said internal holding portion is held in such a manner so as to substantially suppress a movement of said acceleration sensor element along a detection direction while to allow a movement of the vibration-type angular velocity sensor element along a direction in which said vibration-type angular velocity sensor element receives Coriolis force at least by an angular velocity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification