WIRELESS ILLUMINATION SENSING ASSEMBLY
First Claim
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1. A wireless illumination sensing assembly for sensing a property of illumination within a semiconductor processing environment, the assembly comprising:
- a power source;
a wireless communication module coupled to the power source;
measurement circuitry operably coupled to the wireless communication module; and
at least one illumination sensor having an electrical characteristic that varies with the property of illumination, the at least one illumination sensor being coupled to the measurement circuitry.
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Abstract
A wireless illumination sensing assembly for sensing a property of illumination within a semiconductor processing environment is provided. The sensing assembly has a power source and a wireless communication module coupled to the power source. Measurement circuitry is also provided. At least one illumination sensor having an electrical characteristic that varies with the property of illumination. The illumination sensor(s) is/are coupled to the measurement circuitry.
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16 Claims
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1. A wireless illumination sensing assembly for sensing a property of illumination within a semiconductor processing environment, the assembly comprising:
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a power source; a wireless communication module coupled to the power source; measurement circuitry operably coupled to the wireless communication module; and at least one illumination sensor having an electrical characteristic that varies with the property of illumination, the at least one illumination sensor being coupled to the measurement circuitry. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of adjusting illumination of an illumination source in a semiconductor processing environment, the method comprising:
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placing a wireless illumination sensor within a semiconductor processing environment to receive at least some of the illumination; measuring the illumination with the wireless illumination sensor; communicating information regarding the illumination to an illumination controller wirelessly; and adjusting a control signal to an illuminator in the semiconductor processing environment based upon the wirelessly-communicated information.
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Specification