ELECTRONIC DEVICE ON SUBSTRATE WITH CAVITY AND MITIGATED PARASITIC LEAKAGE PATH
First Claim
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1. An electronic device, comprising:
- a first electrode, wherein the electronic device is fabricated on a substrate, wherein the substrate has a cavity created in a top surface of the substrate, and wherein the first electrode is electrically coupled to the substrate; and
a coating layer, wherein the coating layer coats at least part of a substrate surface in the cavity and wherein the presence of the coating layer results in a mitigation of at lest one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate.
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Abstract
An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface of the substrate; and the first electrode is electrically coupled to the substrate. The coating layer coats at least part of a substrate surface in the cavity, and the presence of the coating layer results in a mitigation of at least one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate.
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Citations
19 Claims
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1. An electronic device, comprising:
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a first electrode, wherein the electronic device is fabricated on a substrate, wherein the substrate has a cavity created in a top surface of the substrate, and wherein the first electrode is electrically coupled to the substrate; and a coating layer, wherein the coating layer coats at least part of a substrate surface in the cavity and wherein the presence of the coating layer results in a mitigation of at lest one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8-16. -16. (canceled)
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17. An electronic module, comprising:
a plurality of electronic devices constructed on a substrate, wherein the substrate has at least one cavity created in the top surface of the substrate, wherein at least part of at least one cavity is coated with a coating layer, and wherein the presence of the coating layer results in a mitigation of at least one parasitic leakage path on the substrate. - View Dependent Claims (18)
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19-24. -24. (canceled)
Specification