SEMICONDUCTOR MEMORY DEVICE WITH VARIABLE RESISTANCE ELEMENT
First Claim
1. A semiconductor memory device comprising:
- a variable resistance element having a variable resistor between a first electrode and a second electrode, in which electric resistance between the first electrode and the second electrode is changed by applying a voltage pulse between the first electrode and the second electrode; and
at least one layer of a reaction preventing film.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor memory device comprising a variable resistance element having a variable resistor between a first electrode and a second electrode, in which electric resistance is changed by applying a voltage pulse between the electrodes comprises at least one reaction preventing film made of a material having an action of blocking the permeation of a reduction species promoting a reduction reaction of the variable resistor and an oxidation species promoting an oxidation reaction of the variable resistor. This prevents the resistance value of the variable resistance element from fluctuating due to a reduction reaction or an oxidation reaction of the variable resistor caused by hydrogen or oxygen existing in the manufacturing steps, so that a semiconductor memory device having a small variation of the resistance value and having a good controllability can be realized with good repeatability.
-
Citations
13 Claims
-
1. A semiconductor memory device comprising:
-
a variable resistance element having a variable resistor between a first electrode and a second electrode, in which electric resistance between the first electrode and the second electrode is changed by applying a voltage pulse between the first electrode and the second electrode; and at least one layer of a reaction preventing film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A semiconductor memory device comprising
a variable resistance element having a variable resistor between a first electrode and a second electrode in which electric resistance between the first electrode and the second electrode is changed by applying a voltage pulse between the first electrode and the second electrode, wherein a conductive material filled in a contact hole formed on the first electrode or the second electrode contains a material having a function of suppressing diffusion of at least one of a reduction species and an oxidation species.
Specification