Methods for Performing Quality Control of Process to Treat a Surface
First Claim
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1. A method for performing quality control of a process to treat a surface of a workpiece, comprising:
- generating an ionizing plasma in a gas adjacent to the surface;
determining an intensity at a first wavelength and an intensity at a second wavelength of a spectrum emitted by the ionizing plasma;
calculating a ratio of the intensity at the first wavelength to the intensity at the second wavelength; and
determining an amount of a lubricant on the surface based on the ratio.
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Abstract
The present application is directed to methods for performing quality control analysis of a process to treat a surface of a workpiece. A sensor is placed in proximity to the surface, and a controller analyzes data obtained by analyzing a signal from the sensor. The controller may determine whether the process started properly, the presence of a lubricant on the surface, and the amount of the lubricant.
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Citations
20 Claims
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1. A method for performing quality control of a process to treat a surface of a workpiece, comprising:
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generating an ionizing plasma in a gas adjacent to the surface; determining an intensity at a first wavelength and an intensity at a second wavelength of a spectrum emitted by the ionizing plasma; calculating a ratio of the intensity at the first wavelength to the intensity at the second wavelength; and determining an amount of a lubricant on the surface based on the ratio. - View Dependent Claims (2, 3, 4, 5)
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6. A method of performing quality control of a process to treat a surface of a workpiece, comprising:
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positioning a sensor adjacent to the workpiece during the treatment process, the sensor capable of sensing an emitted spectrum; monitoring a signal from the sensor using an analyzing device, the analyzing device operative to output data based on the signal; analyzing the data and determining an increase in the intensity of the emitted spectrum when the treatment process is initiated, and accepting the workpiece if the increase is above a first predetermined amount; analyzing the data and determining a second increase in an intensity of the emitted spectrum at a first wavelength, and accepting the workpiece if the increase in intensity at the first predetermined wavelength exceeds a second predetermined amount; analyzing the data and determining the intensity of the emitted spectrum at a second wavelength and at a third wavelength, and calculating a ratio of the intensity at the second wavelength to the intensity at the third wavelength, wherein the second wavelength is greater than the third wavelength; comparing the ratio to a predetermined range and accepting the workpiece if the ratio is within the predetermined range. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of performing quality control of a process to treat a surface of a workpiece, comprising:
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exposing the surface to an ionizing gas plasma at about atmospheric pressure; determining the intensity of the spectrum emitted by the plasma at a plurality of wavelengths while the surface is exposed to the plasma; performing a calculation based on the intensity of the emitted spectrum at least two wavelengths; and accepting the workpiece if a result of the calculation is within a predetermined range. - View Dependent Claims (19, 20)
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Specification