Methods for Performing Quality Control of Process to Treat a Surface

• US 20090103074A1
• Filed: 10/17/2007
• Published: 04/23/2009
• Est. Priority Date: 10/17/2007
• Status: Abandoned Application

• Current Assignee: TriboFilm Research Inc.
• Original Assignee: TriboFilm Research Inc.
• Inventors: Cuomo, Jerome J., Sakhrani, Vinay G.
• Application Number:
  US11/873,943
• Publication Number:
  US 20090103074A1
• Time in Patent Office: Days
• US Class Current: 356/51
• CPC Class Codes: G01J 3/443 Emission spectrometry
• CPC Class Codes: G01N 2021/8416 and process controlling, not otherwise provided for
• CPC Class Codes: G01N 21/73 using plasma burners or torches

Abstract

The present application is directed to methods for performing quality control analysis of a process to treat a surface of a workpiece. A sensor is placed in proximity to the surface, and a controller analyzes data obtained by analyzing a signal from the sensor. The controller may determine whether the process started properly, the presence of a lubricant on the surface, and the amount of the lubricant.

Claims

1. A method for performing quality control of a process to treat a surface of a workpiece, comprising:

generating an ionizing plasma in a gas adjacent to the surface;

determining an intensity at a first wavelength and an intensity at a second wavelength of a spectrum emitted by the ionizing plasma;

calculating a ratio of the intensity at the first wavelength to the intensity at the second wavelength; and

determining an amount of a lubricant on the surface based on the ratio.

2. The method of claim 1, wherein determining the intensity at the first wavelength and the second wavelength comprises determining the intensity at the first wavelength and at the second wavelength lower than the first wavelength.

3. The method of claim 1, wherein determining the intensity at the first wavelength and the second wavelength comprises determining the intensity the first wavelength and the second wavelength within a visible emission spectrum.

4. The method of claim 1, further comprising accepting the workpiece if the amount of the lubricant on the surface exceeds a predetermined value.

5. The method of claim 1, further comprising determining ignition of the plasma by determining an increase in intensity of a visible emitted spectrum when a power supply is energized, the power supply operative to generate the plasma.

6. A method of performing quality control of a process to treat a surface of a workpiece, comprising:

positioning a sensor adjacent to the workpiece during the treatment process, the sensor capable of sensing an emitted spectrum;

monitoring a signal from the sensor using an analyzing device, the analyzing device operative to output data based on the signal;

analyzing the data and determining an increase in the intensity of the emitted spectrum when the treatment process is initiated, and accepting the workpiece if the increase is above a first predetermined amount;

analyzing the data and determining a second increase in an intensity of the emitted spectrum at a first wavelength, and accepting the workpiece if the increase in intensity at the first predetermined wavelength exceeds a second predetermined amount;

analyzing the data and determining the intensity of the emitted spectrum at a second wavelength and at a third wavelength, and calculating a ratio of the intensity at the second wavelength to the intensity at the third wavelength, wherein the second wavelength is greater than the third wavelength;

comparing the ratio to a predetermined range and accepting the workpiece if the ratio is within the predetermined range.

7. The method of claim 6, wherein positioning the sensor adjacent to the workpiece comprises positioning at least two sensors about the workpiece.

8. The method of claim 6, wherein positioning the sensor adjacent to the workpiece includes positioning a fiber optic cable between the workpiece and the analyzing device, the fiber optic cable operative to transmit the emitted spectrum to the analyzing device.

9. The method of claim 8, wherein transmitting the emitted spectrum to the analyzing device includes transmitting the emitted spectrum to a spectrophotometer, the spectrophotometer operative to determine an intensity of the emitted spectrum at a variety of wavelengths.

10. The method of claim 6, wherein determining the increase in intensity of the emitted spectrum when the treatment process is initiated comprises determining the increase over a baseline level when a power supply operative to ignite a plasma in a gas in proximity to the surface is energized.

11. The method of claim 6, further comprising determining an amount of lubricant applied to the surface based on the ratio.

12. The method of claim 6, wherein determining the intensity at the second wavelength comprises determining the intensity at a wavelength within a range of about 550 nm to about 900 nm.

13. The method of claim 6, wherein determining the intensity at the third wavelength comprises determining the intensity at a wavelength within a range of about 250 nm to about 550 nm.

14. The method of claim 6, wherein determining the intensity comprises determining the presence of characteristic emission peaks at one or more predetermined wavelengths and measuring the intensity of the characteristic emission peaks at the one or more predetermined wavelengths.

15. The method of claim 6, wherein determining the intensity of the emitted spectrum comprises determining the intensity of a visible spectrum.

16. The method of claim 6, wherein determining the intensity of the emitted spectrum comprises determining the intensity of an infrared spectrum.

17. The method of claim 6, wherein determining the intensity of the emitted spectrum comprises determining the intensity of an ultraviolet spectrum.

18. A method of performing quality control of a process to treat a surface of a workpiece, comprising:

exposing the surface to an ionizing gas plasma at about atmospheric pressure;

determining the intensity of the spectrum emitted by the plasma at a plurality of wavelengths while the surface is exposed to the plasma;

performing a calculation based on the intensity of the emitted spectrum at least two wavelengths; and

accepting the workpiece if a result of the calculation is within a predetermined range.

19. The method of claim 18, wherein determining the intensity of the spectrum comprises determining the intensity of the visible spectrum.

20. The method of claim 18, wherein performing the calculation comprises calculating a ratio of the intensity of the spectrum at a first wavelength to the intensity of the spectrum at a second wavelength, the first wavelength greater than the second wavelength.