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Pendulous accelerometer with balanced gas damping

  • US 20090107238A1
  • Filed: 10/26/2007
  • Published: 04/30/2009
  • Est. Priority Date: 10/26/2007
  • Status: Active Grant
First Claim
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1. A pendulous accelerometer comprising:

  • a) a substrate having a substantially planar upper surface;

    b) a sensing plate having a central anchor portion supported on the upper surface of the substrate to define a hinge axis, the sensing plate including a solid proof mass on a first side of the central anchor portion and a substantially hollow proof mass on a second side of the central anchor portion, the solid proof mass having a first lower surface with a first electrode element thereon, and the substantially hollow proof mass having a second lower surface with a second electrode element thereon, wherein the sensing plate is mounted to rotate about the hinge axis relative to the upper surface of the substrate in response to an acceleration of the proof masses;

    c) a first electrode section positioned on the upper surface of the substrate beneath the solid proof mass to interact with the electrode element on the lower surface of the solid proof mass; and

    d) a second electrode section positioned on the upper surface of the substrate beneath the hollow proof mass to interact with the electrode element on the lower surface of the hollow proof mass.

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