Semiconductor device
First Claim
1. A semiconductor device including:
- a semiconductor substrate; and
an MEMS sensor provided on the semiconductor substrate, whereinthe MEMS sensor comprises;
a first electrode having a plurality of first interdigital portions aligned in a prescribed direction X at an interval;
a second electrode, having a plurality of second interdigital portions aligned in the direction X at an interval, so arranged that the second interdigital portions are opposed to the first interdigital portions in the direction X respectively;
a third electrode having a plurality of third interdigital portions aligned in a direction Y orthogonal the direction X at an interval;
a fourth electrode, having a plurality of fourth interdigital portions aligned in the direction Y at an interval, so arranged that the fourth interdigital portions are opposed to the third interdigital portions in the direction Y respectively; and
a fifth electrode opposed to the first electrode, the second electrode, the third electrode and the fourth electrode in a direction Z orthogonal to the direction X and the direction Y.
1 Assignment
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Accused Products
Abstract
A semiconductor device according to the present invention includes a semiconductor substrate and an MEMS sensor provided on the semiconductor substrate. The MEMS sensor includes a first electrode having a plurality of first interdigital portions aligned in a prescribed direction X at an interval, a second electrode, having a plurality of second interdigital portions aligned in the direction X at an interval, so arranged that the second interdigital portions are opposed to the first interdigital portions in the direction X respectively, a third electrode having a plurality of third interdigital portions aligned in a direction Y orthogonal the direction X at an interval, a fourth electrode, having a plurality of fourth interdigital portions aligned in the direction Y at an interval, so arranged that the fourth interdigital portions are opposed to the third interdigital portions in the direction Y respectively, and a fifth electrode opposed to the first electrode, the second electrode, the third electrode and the fourth electrode in a direction Z orthogonal to the direction X and the direction Y.
10 Citations
8 Claims
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1. A semiconductor device including:
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a semiconductor substrate; and an MEMS sensor provided on the semiconductor substrate, wherein the MEMS sensor comprises; a first electrode having a plurality of first interdigital portions aligned in a prescribed direction X at an interval; a second electrode, having a plurality of second interdigital portions aligned in the direction X at an interval, so arranged that the second interdigital portions are opposed to the first interdigital portions in the direction X respectively; a third electrode having a plurality of third interdigital portions aligned in a direction Y orthogonal the direction X at an interval; a fourth electrode, having a plurality of fourth interdigital portions aligned in the direction Y at an interval, so arranged that the fourth interdigital portions are opposed to the third interdigital portions in the direction Y respectively; and a fifth electrode opposed to the first electrode, the second electrode, the third electrode and the fourth electrode in a direction Z orthogonal to the direction X and the direction Y. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification