BRAZED CVD SHOWER HEAD
First Claim
1. A shower head for a chemical vapor deposition chamber, the shower head comprising:
- a housing;
a plurality of bosses formed upon the housing, the bosses having bores formed therethrough;
an inside cover attached to the bosses, the inside cover having apertures formed therein such that the apertures are generally contiguous with the bores; and
wherein the housing, the bosses, and the inside cover cooperate to communicate water for cooling of the shower head.
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0 Petitions
Accused Products
Abstract
A shower head for a chemical vapor deposition chamber can have a housing, a plurality of bosses formed upon the housing, and an inside cover. The bosses can have bores formed therethrough. The inside cover can be attached to the bosses and can have apertures formed therein such that the apertures are generally contiguous with the bores. The housing, the bosses, and the inside cover cooperate to communicate water through the shower head. The water can cool the shower head to a temperature that is substantially lower than the temperature of other parts of the chemical vapor deposition chamber, e.g., the susceptor thereof.
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Citations
21 Claims
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1. A shower head for a chemical vapor deposition chamber, the shower head comprising:
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a housing; a plurality of bosses formed upon the housing, the bosses having bores formed therethrough; an inside cover attached to the bosses, the inside cover having apertures formed therein such that the apertures are generally contiguous with the bores; and wherein the housing, the bosses, and the inside cover cooperate to communicate water for cooling of the shower head. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of forming a shower head for a chemical vapor deposition chamber, the method comprising:
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forming a plurality of bosses on a housing; attaching an inside cover to the bosses so as to form a watertight seal with respect to the bosses; and wherein the housing, the bosses, and the inside cover cooperate to communicate water for cooling of the shower head. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A method of cooling a shower head of a chemical vapor deposition chamber, the method comprising communicating water around a plurality of bosses formed in a housing of the shower head, the bosses having bores extending therethrough to facilitate injection of reactant gases into the chemical deposition chamber.
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21. A chemical vapor deposition chamber comprising:
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a susceptor; a shower head disposed proximate the susceptor, the shower head comprising; a housing; a plurality of bosses formed upon the housing, the bosses having bores formed therethrough; an inside cover attached to the bosses, the inside cover having apertures formed therein such that the apertures are generally contiguous with the bores; and wherein the housing, the bosses, and the inside cover cooperate to communicate water for cooling of the shower head.
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Specification