BRAZED CVD SHOWER HEAD

• US 20090107403A1
• Filed: 03/28/2008
• Published: 04/30/2009
• Est. Priority Date: 10/31/2007
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Moshtagh, Vahid S., Ramer, Jeffrey C.
• Granted Patent: US 8,668,775 B2
• Time in Patent Office: Days
• US Class Current: 118/728
• CPC Class Codes: C23C 16/45504 Laminar flow
• CPC Class Codes: C23C 16/45508 Radial flow
• CPC Class Codes: C23C 16/45572 Cooled nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: C30B 29/406 Gallium nitride
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A shower head for a chemical vapor deposition chamber can have a housing, a plurality of bosses formed upon the housing, and an inside cover. The bosses can have bores formed therethrough. The inside cover can be attached to the bosses and can have apertures formed therein such that the apertures are generally contiguous with the bores. The housing, the bosses, and the inside cover cooperate to communicate water through the shower head. The water can cool the shower head to a temperature that is substantially lower than the temperature of other parts of the chemical vapor deposition chamber, e.g., the susceptor thereof.

Claims

1. A shower head for a chemical vapor deposition chamber, the shower head comprising:

a housing;

a plurality of bosses formed upon the housing, the bosses having bores formed therethrough;

an inside cover attached to the bosses, the inside cover having apertures formed therein such that the apertures are generally contiguous with the bores; and

wherein the housing, the bosses, and the inside cover cooperate to communicate water for cooling of the shower head.

2. The shower head as recited in claim 1, wherein the housing is configured to facilitate the formation of a vacuum with the chamber.

3. The shower head as recited in claim 1, wherein the bosses are formed upon a bottom surface of the housing.

4. The shower head as recited in claim 1, wherein the housing is formed of stainless steel.

5. The shower head as recited in claim 1, wherein the bosses are formed of stainless steel.

6. The shower head as recited in claim 1, wherein the inside cover is formed of stainless steel.

7. The shower head as recited in claim 1, wherein the bosses are formed integrally with the housing.

8. The shower head as recited in claim 1, wherein the inside cover is brazed to the housing.

9. The shower head as recited in claim 1, wherein the inside cover is brazed to the bosses and a periphery of the housing.

10. The shower head as recited in claim 1, wherein the bores of the bosses and the apertures of the inside cover cooperate to communicate reactant gases into the chemical vapor deposition chamber.

11. The shower head as recited in claim 1, further comprising at least one partition defining a plurality of zones, the zones separating reactant gases prior to the reactant gases entering the chemical vapor deposition chamber.

12. The shower head as recited in claim 1, further comprising a plurality of concentric, generally circular, partitions defining a plurality of zones, the zones separating reactant gases prior to the reactant gases entering the chemical vapor deposition chamber.

13. The shower head as recited in claim 1, further comprising at least one partition formed integrally with the housing, the partition(s) defining a plurality of zones, the zones separating reactant gases prior to the reactant gases entering the chemical vapor deposition chamber.

14. A method of forming a shower head for a chemical vapor deposition chamber, the method comprising:

forming a plurality of bosses on a housing;

attaching an inside cover to the bosses so as to form a watertight seal with respect to the bosses; and

wherein the housing, the bosses, and the inside cover cooperate to communicate water for cooling of the shower head.

15. The method as recited in claim 14, wherein forming a plurality of bosses on a housing comprises forming a plurality of bosses integrally with the housing.

16. The method as recited in claim 14, wherein forming a plurality of bosses on a housing comprises machining a plurality of bossing into the housing.

17. The method as recited in claim 14, wherein attaching an inside cover to the bosses comprises brazing the inside cover to the bosses.

18. The method as recited in claim 14, wherein attaching an inside cover to the bosses comprises brazing the inside cover to the bosses by disposing a sheet comprised of nickel intermediate the inside cover and the bosses and then heating the inside cover, the bosses, and the sheet.

19. The method as recited in claim 14, further comprising forming at least one partition upon the housing, the partition(s) defining a plurality of zones, the zones separating reactant gases prior to the reactant gases entering the chemical vapor deposition chamber.

20. A method of cooling a shower head of a chemical vapor deposition chamber, the method comprising communicating water around a plurality of bosses formed in a housing of the shower head, the bosses having bores extending therethrough to facilitate injection of reactant gases into the chemical deposition chamber.

21. A chemical vapor deposition chamber comprising:

a susceptor;

a shower head disposed proximate the susceptor, the shower head comprising;

a housing;

a plurality of bosses formed upon the housing, the bosses having bores formed therethrough;

an inside cover attached to the bosses, the inside cover having apertures formed therein such that the apertures are generally contiguous with the bores; and

wherein the housing, the bosses, and the inside cover cooperate to communicate water for cooling of the shower head.