Direct laser and ultraviolet lithography of porous silicon photonic crystal devices

• US 20090111046A1
• Filed: 08/11/2008
• Published: 04/30/2009
• Est. Priority Date: 08/10/2007
• Status: Abandoned Application

• Current Assignee: Vanderbilt University
• Original Assignee: Vanderbilt University
• Inventors: Park, Heungmann, Harju, David A., Dickerson, James H., Stramel, Alex A., Weiss, Sharon M.
• Application Number:
  US12/228,430
• Publication Number:
  US 20090111046A1
• Time in Patent Office: Days
• US Class Current: 430/270.100
• CPC Class Codes: G03F 7/0754 Non-macromolecular compounds containing silicon-to-silicon bonds G03F7/0752 takes precedence
• CPC Class Codes: H01L 2933/0083 Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
• CPC Class Codes: H01L 33/346 containing porous silicon

Abstract

We have developed a simple method to locally change the optical properties of porous silicon multilayers and photonic crystal architectures. This technique allows for the direct photolithography of porous silicon multilayers, heterostructures, and photonic crystals. The procedure controls the local oxidation within the porous silicon layers via ultraviolet radiation or via high intensity laser beam (λ=532.8 nm) exposure. Subsequently, immersion of the non-irradiated and irradiated regions of the porous silicon heterostructures within an alcohol solvent (for example, methanol and ethanol) induces either a marked degradation or no degradation, respectively, in the optical properties of the material. This direct, optical lithographic technique may have significant use in the production of silicon-based optical and opto-electronic devices for laser, optical computation, telecommunications, and other applications. Potential devices include patternable porous silicon waveguides, optical filter, optical switches, and photonic band-gap structures.

Claims

1. A method, comprising

exposing a first portion of a porous silicon surface to actinic radiation to promote oxidation on the first portion of the porous silicon surface;

and

exposing the porous silicon surface to an alcohol solvent to change the optical properties of a second portion of the porous silicon surface.

2. The method of claim 1, wherein the optical properties of the second portion of the porous silicon surface are substantially degraded.

3. The method of claim 1, wherein the changed optical properties of the second portion of the porous silicon surface includes a photonic stop-band that is narrowed, reduced in magnitude and shifted to shorter wavelengths compared to compared to its original spectral position.

4. The method of claim 1, wherein exposing the first portion of the porous silicon surface to actinic radiation includes photolithographically patterning the porous silicon surface.

5. The method of claim 1, wherein exposing the porous silicon surface to the alcohol solvent includes immersing the porous silicon surface in the alcohol solvent.

6. The method of claim 1, wherein the alcohol solvent includes at least one member selected from the group consisting of methanol and ethanol.

7. The method of claim 1, wherein the porous silicon surface is prepared by electrolyte etching.

8. An assembly, comprising an article of manufacture made by the method of claim 1.

9. A composition made by the method of claim 1.

12. A composition, comprising a porous silicon surface including

a first portion of the porous silicon surface;

and

a second portion of the silicon surface, characterized by a second portion photonic stop-band that is narrowed, reduced in magnitude and shifted to shorter wavelengths compared to a spectral position of a first portion photonic stop-band.

13. The composition of claim 12, wherein the first portion of the porous silicon surface is prepared by exposing the first portion of a porous silicon surface to actinic radiation to promote oxidation on the first portion of the porous silicon surface and the second portion of the porous is prepared by exposing the porous silicon surface to an alcohol solvent to change the optical properties of the second portion of the porous silicon surface.

14. A heterostructure comprising the composition of claim 12.

15. A photonic crystal comprising the composition of claim 12.