Methods to make piezoelectric ceramic thick film array and single elements and devices
First Claim
1. A method of producing at least one piezoelectric element comprising:
- depositing a piezoelectric ceramic material onto a first surface of at least one first reusable single layer substrate structure to form at least one piezoelectric element structure, wherein a first surface of the piezoelectric ceramic material and the first surface of the first reusable single layer substrate are in direct contact;
depositing an electrode on a second surface of the at least one piezoelectric element structure;
bonding the at least one piezoelectric element structure to a second substrate, the second substrate being conductive or having a conductive layer;
removing the at least one first reusable single layer substrate from the at least one piezoelectric element structure;
depositing a second side electrode on the first surface of the at least one piezoelectric element structure; and
poling, by applying a DC voltage to the at least one piezoelectric element structure, to provide the at least one piezoelectric element structure with piezoelectric characteristics.
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Abstract
A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element structure. Then an electrode is deposited on a surface of the at least one piezoelectric element structure. Next, the at least one piezoelectric element structure is bonded to a second substrate, the second substrate being conductive or having a conductive layer. The first substrate is then removed from the at least one piezoelectric element structure and a second side electrode is deposited on a second surface of the at least one piezoelectric element structure. A poling operation is performed to provide the at least one piezoelectric element structure with piezoelectric characteristics.
In another embodiment, a material for a thick film element is deposited onto a surface of a first substrate to form a thick film element structure having a thickness of between greater than 10 μm to 100 μm. The at least one thick film element structure is bonded to a second substrate. Thereafter, the first substrate is removed from the at least one thick film element structure using a liftoff process which includes emitting, from a radiation source (such as a laser or other appropriate device), a beam through the first substrate to an attachment interface formed between the first substrate and the at least one thick film element structure at the surface of the first substrate. The first substrate is substantially transparent at the wavelength of the beam, and the beam generates sufficient energy at the interface to break the attachment.
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Citations
23 Claims
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1. A method of producing at least one piezoelectric element comprising:
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depositing a piezoelectric ceramic material onto a first surface of at least one first reusable single layer substrate structure to form at least one piezoelectric element structure, wherein a first surface of the piezoelectric ceramic material and the first surface of the first reusable single layer substrate are in direct contact; depositing an electrode on a second surface of the at least one piezoelectric element structure; bonding the at least one piezoelectric element structure to a second substrate, the second substrate being conductive or having a conductive layer; removing the at least one first reusable single layer substrate from the at least one piezoelectric element structure; depositing a second side electrode on the first surface of the at least one piezoelectric element structure; and poling, by applying a DC voltage to the at least one piezoelectric element structure, to provide the at least one piezoelectric element structure with piezoelectric characteristics. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 18, 19, 21, 22, 23)
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17. The method according to claim 17, wherein the polishing step is a dry tape polishing procedure.
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20. (canceled)
Specification