INTEGRATED MICROELECTROMECHANICAL SYSTEMS (MEMS) VIBRATING MASS Z-AXIS RATE SENSOR
First Claim
1. A sensor configure to measure angular velocity about an axis that is normal to a sensing plane of the angular rate sensor, the angular rate sensor comprising:
- a sensing subassembly comprisinga substantially planar frame parallel to the sensing plane;
a first proof mass disposed in the sensing plane;
a second proof mass disposed in the sensing plane laterally to the first proof mass; and
a linkage within the frame and connected to the frame, the linkage being connected to the first proof mass and to the second proof mass;
an actuator for driving the first proof mass and the second proof mass into oscillation along a drive axis in the sensing plane, the actuator to drive the first proof mass and the second proof mass 180 degrees out-of-phase;
a first transducer to sense motion of the frame in response to a Coriolis force acting on the oscillating first proof mass and the oscillating second proof mass; and
a base plate which is parallel to the sensing plane and to which the sensing subassembly is attached.
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Abstract
A sensor that measures angular velocity about an axis that is normal to a sensing plane of the sensor. The sensor comprises a sensing subassembly that includes a planar frame parallel to the sensing plane, a first proof mass disposed in the sensing plane, a second proof mass disposed in the sensing plane laterally to the first proof mass, and a linkage within the frame and connected to the frame. The linkage is connected to the first proof mass and to the second proof mass. The sensor further includes actuator for driving the first proof mass and the second proof mass into oscillation along a drive axis in the sensing plane. The sensor further includes a first transducer to sense motion of the frame in response to a Coriolis force acting on the oscillating first proof mass and the oscillating second proof mass.
94 Citations
28 Claims
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1. A sensor configure to measure angular velocity about an axis that is normal to a sensing plane of the angular rate sensor, the angular rate sensor comprising:
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a sensing subassembly comprising a substantially planar frame parallel to the sensing plane; a first proof mass disposed in the sensing plane; a second proof mass disposed in the sensing plane laterally to the first proof mass; and a linkage within the frame and connected to the frame, the linkage being connected to the first proof mass and to the second proof mass; an actuator for driving the first proof mass and the second proof mass into oscillation along a drive axis in the sensing plane, the actuator to drive the first proof mass and the second proof mass 180 degrees out-of-phase; a first transducer to sense motion of the frame in response to a Coriolis force acting on the oscillating first proof mass and the oscillating second proof mass; and a base plate which is parallel to the sensing plane and to which the sensing subassembly is attached. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification