METHOD AND APPARATUS FOR SEALING AN OPENING OF A PROCESSING CHAMBER

• US 20090114153A1
• Filed: 10/15/2008
• Published: 05/07/2009
• Est. Priority Date: 11/01/2007
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Anwar, Suhail, Matsumoto, Takayuki, Kurita, Shinichi, White, John M., Tiner, Robin L.
• Application Number:
  US12/252,055
• Publication Number:
  US 20090114153A1
• Time in Patent Office: Days
• US Class Current: 118/722
• CPC Class Codes: C23C 16/45517 Confinement of gases to vicinity of substrate
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating

Abstract

A method and apparatus for sealing an opening of a processing chamber are provided. In one embodiment, the invention generally provides a closure member integrated within a wall of a process chamber for sealing an opening within the wall of the chamber. In another embodiment, the invention provides a closure member configured to seal an opening in the wall of a processing chamber from the inside of the chamber.

Claims

1. An apparatus for sealing an opening in a wall of a processing chamber, comprising:

a closure member at least partially disposed between a front plate adjacent a processing volume and a rear plate of the wall, wherein the closure member has an extended portion extending vertically away from the opening;

a conductive bumper disposed between the closure member and the front plate of the wall; and

a deployment mechanism configured to move the closure member both vertically and horizontally with respect to the opening.

2. The apparatus of claim 1, wherein the closure member comprises a door member adapted to contact the front plate and seal the opening.

3. The apparatus of claim 2, wherein the door member comprises resilient member.

4. The apparatus of claim 3, wherein the closure member further comprises a bracing member moveable relative to the door member and adapted to contact the rear plate.

5. The apparatus of claim 4, further comprising an actuator adapted to move the bracing member away from the door member and into contact with the rear plate so as to brace the door member against the front plate.

6. A method for sealing an opening in a wall of a processing chamber, comprising:

activating a deployment mechanism to move an enclosure member with respect to the opening via an extended portion of the closure member, wherein the closure member is disposed between a front plate and a rear plate of the wall, and wherein the closure member has a door member and a bracing member;

moving the door member into contact with the front plate to seal the opening in the chamber wall.

7. The method of claim 6, further comprising establishing electrical contact between the door member and the front plate of the chamber wall.

8. The method of claim 7, wherein the door member includes an electrically conductive resilient member for sealing the opening.

9. The method of claim 8, further comprising moving the bracing member with respect to the door member via an actuator.

10. The method of claim 9, further comprising activating the actuator to move the bracing member into contact with the rear plate of the chamber wall so as to brace the door member against the front wall.

11. A processing chamber, comprising:

a wall having a front plate adjacent a processing volume, a rear plate, and an opening extending therethrough;

a closure member configured between the front plate and the rear plate; and

a deployment mechanism configured to move the closure member with respect to the opening.

12. The processing chamber of claim 11, wherein the closure member comprises a door member configured to contact the front plate to seal the opening and a bracing member moveable with respect to the door member configured to contact the rear plate.

13. The processing chamber of claim 12, further comprising an actuator configured to move the bracing member away from the door member and into contact with the rear plate so as to brace the door member against the front plate.

14. The processing chamber of claim 13, further comprising a conductive bumper to establish electrical contact between the door member and the front plate.

15. A processing chamber, comprising:

a chamber body having a bottom and a wall with an opening extending therethrough;

a closure member disposed within the chamber body, wherein the closure member has at least one electrically conductive sealing member disposed thereon; and

a deployment mechanism configured to move the closure member with respect to the opening.

16. The processing chamber of claim 15, wherein the wall comprises an upper portion with a groove disposed in a lower surface thereof and a lower portion with a lip extending therefrom.

17. The processing chamber of claim 16, wherein the closure member has a tongue member extending from an upper surface thereof and a recess with an electrically conductive resilient member disposed thereon.

18. The processing chamber of claim 17, wherein the electrically conductive resilient member is a conductive elastomer.

19. The processing chamber of claim 17, wherein the electrically conductive resilient member comprises a material selected from the group consisting of aluminum plated stainless steel, high nickel alloy steel, and chromium-nickel alloy steel.

20. The processing chamber of claim 17, wherein the wall comprises a wall member attached to the floor and a plate member fastened to the wall member above the opening.

21. The processing chamber of claim 20, wherein a recess is formed in the plate member.

22. A method for sealing an opening in a wall of a processing chamber, comprising:

activating a deployment mechanism to move an enclosure member that is disposed within the processing chamber with respect to the opening via an extended portion of the closure member;

moving a door member of the closure member that is enclosed within the processing chamber into contact with the wall to seal the opening in the chamber wall; and

establishing electrical contact between the door member and the chamber wall.

23. The method of claim 22, wherein the door member includes an electrically conductive resilient member for sealing the opening.

24. The method of claim 23, further comprising inserting a tongue member of the door member within a recess formed in the wall to form a labyrinth seal.

25. The method of claim 24, wherein an interior surface of the door member is substantially flush with an interior surface of the wall.