RFID-CONTAINING CARRIERS USED FOR SILICON WAFER QUALITY

• US 20090114549A1
• Filed: 11/05/2007
• Published: 05/07/2009
• Est. Priority Date: 11/05/2007
• Status: Active Grant

• Current Assignee: P.R. Hoffman Machine Products, Inc. (Amtech Systems, Inc.)
• Original Assignee: P.R. Hoffman Machine Products, Inc. (Amtech Systems, Inc.)
• Inventors: Albright, John Wesley JR.
• Granted Patent: US 8,388,410 B2
• Time in Patent Office: Days
• US Class Current: 205/710
• CPC Class Codes: B24B 37/16 characterised by the shape of the lapping plate surface, e.g. grooved

Abstract

A carrier configured for use in a lapping machine includes a body having a first opening for carrying a work piece during operation of the lapping machine. A device is arranged and disposed in the body. The device is configured to retain information readable by a reading device for identifying the body.

Claims

1. A carrier for use in a lapping machine comprising:

a body having a first opening for carrying a work piece during operation of the lapping machine; and

a device arranged and disposed in the body, the device configured to retain information readable by a reading device for identifying the body.

2. The carrier of claim 1, wherein the body includes a first surface in close proximity with the lapping machine, the device disposed at a predetermined spacing from the first surface.

3. The carrier of claim 2, wherein the body includes a second surface in close proximity with the lapping machine opposite the first surface, the device disposed at a predetermined spacing from the second surface.

4. The carrier of claim 3, wherein the device is substantially surrounded by a substance fixedly securing the device in the body.

5. The carrier of claim 4, wherein the substance is substantially disposed between each of the first and second surfaces of the body and corresponding surfaces of the device.

6. The carrier of claim 5, wherein the reading device is configured to read device information through the substance.

7. The carrier of claim 6, wherein the device is a radio frequency identification marker.

8. The carrier of claim 6, wherein the substance is a plastic.

9. The carrier of claim 6, wherein the substance is an adhesive.

10. The carrier of claim 6, wherein the substance is provided in different colors.

11. The carrier of claim 1 wherein the work piece is composed of a semiconductor material or a rigid material.

12. The carrier of claim 1 wherein the device is disposed in a second opening, the first and second opening forming a single opening.

13. A carrier for use in a lapping machine comprising:

a body having a first opening for carrying a work piece during operation of the lapping machine, the body having opposed surfaces in close proximity with the lapping machine; and

a device arranged and disposed in the body between the opposed surfaces, the device configured to retain information readable by a reading device for identifying the body.

14. The carrier of claim 13, wherein the device is substantially surrounded by a substance fixedly securing the device in the body, the body information is configured to be readable through the substance by the reading device.

15. A method for providing quality control associated with processing of work pieces, the method comprising:

providing a body having a first opening for carrying a work piece during operation of a lapping machine;

positioning a device in the body, the device configured to retain information readable by a reading device associated with identification of the body; and

reading the device information by the reading device corresponding to processing of a work piece.

16. The method of claim 15, wherein the body includes a first surface in close proximity with the lapping machine, and wherein the step of positioning includes positioning a device at a predetermined spacing from the first surface.

17. The method of claim 16, wherein the body includes a second surface in close proximity with the lapping machine, and wherein the step of positioning includes positioning a device at a predetermined spacing from the second surface.

18. The method of claim 17 wherein a substance is used to position the device in the body.

19. The method of claim 18 wherein the reading device is configured to read device information through the substance.

20. The carrier of claim 16, wherein the substance is provided in different colors.