METHODS AND SYSTEMS FOR SEMICONDUCTOR TESTING USING REFERENCE DICE

• US 20090119048A1
• Filed: 12/30/2008
• Published: 05/07/2009
• Est. Priority Date: 07/05/2006
• Status: Active Grant

• Current Assignee: Optimal Plus Ltd. (Emerson Electric Company)
• Original Assignee: Optimaltest, Ltd. (Emerson Electric Company)
• Inventors: Balog, Gil
• Granted Patent: US 7,737,716 B2
• Time in Patent Office: Days
• US Class Current: 702/83
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: G01R 31/31707 Test strategies methods for generation of test sequences G01R31/318371
• CPC Class Codes: G01R 31/318511 Wafer Test

Abstract

Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted.

Claims

1. A method of semiconductor testing, comprising:

identifying or not identifying a semiconductor die provided for testing as a reference die which had been previously selected as representative of a group of dice in a wafer that can be assumed to respond similarly to testing, wherein said group includes less than all dice in said wafer, and wherein less than all dice in said group had been previously selected as a reference die;

if said die is identified as a reference die, testing said die with a reference die test flow; and

if said die is not identified as a reference die, testing said die with a non-reference die test flow.

2. The method of claim 1, wherein there are a plurality of reference die test flows further comprising:

recognizing said identified reference die as corresponding to one of said plurality of reference die test flows and wherein said testing with a reference die test flow includes testing with said corresponding reference die test flow.

3. The method of claim 1, wherein said testing said die with a reference die test flow includes applying a data collection test not included in said non-reference die test flow.

4. The method of claim 1, wherein said testing said die with a reference die test flow includes applying a failure identification test not included in said non-reference die test flow.

5. The method of claim 1, wherein said testing said die with a reference die test flow includes applying a test which is different compared to a test included in said non-reference die test flow.

6. The method of claim 1, further comprising:

adjusting or not adjusting said non-reference die test flow based on data relating to reference dice, prior to testing said die not identified as a reference die.

7. The method of claim 6, wherein said data relating to reference dice includes a comparison between a failure rate for a test for reference dice compared to a predefined threshold.

8. The method of claim 7, wherein said comparison is between a number of reference dice which failed said test compared to a predefined threshold.

9. The method of claim 7, wherein said comparison is between a number of sequential reference dice which failed said test compared to a predefined threshold.

10. The method of claim 6, wherein said data relating to reference dice includes parametric test results.

11. The method of claim 6, wherein said adjusting includes adding at least one test to said non-reference die test flow.

12. The method of claim 6, wherein said adjusting includes changing at least one test in said non-reference die test flow.

13. The method of claim 6, wherein said adjusting includes additional stressing.

14. The method of claim 1, further comprising at least one selected from a group comprising:

changing a test limit for a test, bypassing a test, executing a test, changing a search limit, changing a force value, turning a datalog on, turning a datalog off, updating a test flow, retesting, resorting, holding, scrapping, and tagging.

15. The method of claim 1, further comprising:

adjusting a test workflow based on data relating to reference dice.

16. A method of semiconductor testing, comprising:

determining a group of semiconductor dice in a wafer which can be assumed to respond similarly to testing, wherein said group includes less than all dice in said wafer; and

selecting at least one reference die from said group for testing differently than other dice in said group which were not selected as reference dice, wherein said at least one reference die includes less than all dice in said group.

17. A method of semiconductor testing, comprising:

determining a group of semiconductor dice in a wafer which can be assumed to respond similarly to testing, wherein said group includes less than all dice in said wafer;

selecting at least one reference die from said group, wherein said at least one reference die includes less than all dice in said group; and

applying test flows to said group, wherein a test flow applied to a selected reference die from said group differs from a test flow applied to a die which was not selected as a reference die from said group.